3/13/2012	8:14:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	8:14:16 AM	Recipe started at 8:14 AM
3/13/2012	8:14:16 AM	Helium valve closed
3/13/2012	8:14:16 AM	H2 valve closed
3/13/2012	8:14:16 AM	BCl3 valve closed
3/13/2012	8:14:16 AM	PH3 valve closed
3/13/2012	8:14:16 AM	SiCl4 pre valve closed
3/13/2012	8:14:16 AM	SiCl4 post valve closed
3/13/2012	8:14:16 AM	Main Vac valve closed
3/13/2012	8:14:16 AM	Bypass valve closed
3/13/2012	8:14:16 AM	Bubbler valve closed
3/13/2012	8:14:16 AM	Helium MFC set to  0.000000
3/13/2012	8:14:16 AM	H2 MFC set to  0.000000
3/13/2012	8:14:16 AM	BCl3 MFC set to  0.000000
3/13/2012	8:14:16 AM	PH3 MFC set to  0.000000
3/13/2012	8:14:16 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:14:16 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:14:17 AM	Tube furnace set to 0
3/13/2012	8:14:20 AM	H2 valve closed
3/13/2012	8:14:20 AM	BCl3 valve closed
3/13/2012	8:14:20 AM	PH3 valve closed
3/13/2012	8:14:20 AM	SiCl4 pre valve closed
3/13/2012	8:14:20 AM	SiCl4 post valve closed
3/13/2012	8:14:20 AM	Main Vac valve closed
3/13/2012	8:14:20 AM	Bypass valve closed
3/13/2012	8:14:20 AM	Bubbler valve closed
3/13/2012	8:14:20 AM	Helium valve opened
3/13/2012	8:14:20 AM	Helium MFC set to  500.000000
3/13/2012	8:14:20 AM	H2 MFC set to  0.000000
3/13/2012	8:14:20 AM	BCl3 MFC set to  0.000000
3/13/2012	8:14:20 AM	PH3 MFC set to  0.000000
3/13/2012	8:14:20 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:14:20 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:14:20 AM	Tube furnace set to 0
3/13/2012	8:15:25 AM	Helium valve closed
3/13/2012	8:15:25 AM	H2 valve closed
3/13/2012	8:15:25 AM	BCl3 valve closed
3/13/2012	8:15:25 AM	PH3 valve closed
3/13/2012	8:15:25 AM	SiCl4 pre valve closed
3/13/2012	8:15:25 AM	SiCl4 post valve closed
3/13/2012	8:15:25 AM	Main Vac valve closed
3/13/2012	8:15:25 AM	Bypass valve closed
3/13/2012	8:15:25 AM	Bubbler valve closed
3/13/2012	8:15:25 AM	Helium MFC set to  0.000000
3/13/2012	8:15:25 AM	H2 MFC set to  0.000000
3/13/2012	8:15:25 AM	BCl3 MFC set to  0.000000
3/13/2012	8:15:25 AM	PH3 MFC set to  0.000000
3/13/2012	8:15:25 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:15:25 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:15:25 AM	Tube furnace set to 0
3/13/2012	8:15:26 AM	Run finished at 8:15 AM
3/13/2012	8:15:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	8:19:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	8:19:24 AM	Recipe started at 8:19 AM
3/13/2012	8:19:24 AM	Helium valve closed
3/13/2012	8:19:24 AM	H2 valve closed
3/13/2012	8:19:24 AM	BCl3 valve closed
3/13/2012	8:19:24 AM	PH3 valve closed
3/13/2012	8:19:24 AM	SiCl4 pre valve closed
3/13/2012	8:19:24 AM	SiCl4 post valve closed
3/13/2012	8:19:24 AM	Main Vac valve closed
3/13/2012	8:19:24 AM	Bubbler valve closed
3/13/2012	8:19:24 AM	Bypass valve opened
3/13/2012	8:19:24 AM	Helium MFC set to  0.000000
3/13/2012	8:19:24 AM	H2 MFC set to  0.000000
3/13/2012	8:19:24 AM	BCl3 MFC set to  0.000000
3/13/2012	8:19:24 AM	PH3 MFC set to  0.000000
3/13/2012	8:19:24 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:19:24 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:19:24 AM	Tube furnace set to 0
3/13/2012	8:20:26 AM	Helium valve closed
3/13/2012	8:20:26 AM	H2 valve closed
3/13/2012	8:20:26 AM	BCl3 valve closed
3/13/2012	8:20:26 AM	PH3 valve closed
3/13/2012	8:20:26 AM	SiCl4 pre valve closed
3/13/2012	8:20:26 AM	SiCl4 post valve closed
3/13/2012	8:20:26 AM	Main Vac valve closed
3/13/2012	8:20:26 AM	Bubbler valve closed
3/13/2012	8:20:26 AM	Bypass valve opened
3/13/2012	8:20:26 AM	Helium MFC set to  0.000000
3/13/2012	8:20:26 AM	H2 MFC set to  0.000000
3/13/2012	8:20:26 AM	BCl3 MFC set to  0.000000
3/13/2012	8:20:26 AM	PH3 MFC set to  0.000000
3/13/2012	8:20:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:20:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:20:26 AM	Tube furnace set to 0
3/13/2012	8:21:26 AM	Helium valve closed
3/13/2012	8:21:26 AM	H2 valve closed
3/13/2012	8:21:26 AM	BCl3 valve closed
3/13/2012	8:21:26 AM	PH3 valve closed
3/13/2012	8:21:26 AM	SiCl4 pre valve closed
3/13/2012	8:21:26 AM	SiCl4 post valve closed
3/13/2012	8:21:26 AM	Bypass valve closed
3/13/2012	8:21:26 AM	Bubbler valve closed
3/13/2012	8:21:26 AM	Main Vac valve opened
3/13/2012	8:21:26 AM	Helium MFC set to  0.000000
3/13/2012	8:21:26 AM	H2 MFC set to  0.000000
3/13/2012	8:21:26 AM	BCl3 MFC set to  0.000000
3/13/2012	8:21:26 AM	PH3 MFC set to  0.000000
3/13/2012	8:21:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:21:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:21:26 AM	Tube furnace set to 0
3/13/2012	8:21:27 AM	Run finished at 8:21 AM
3/13/2012	8:21:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	8:32:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	8:32:47 AM	Recipe started at 8:32 AM
3/13/2012	8:32:47 AM	Helium valve closed
3/13/2012	8:32:47 AM	H2 valve closed
3/13/2012	8:32:47 AM	BCl3 valve closed
3/13/2012	8:32:47 AM	PH3 valve closed
3/13/2012	8:32:47 AM	SiCl4 pre valve closed
3/13/2012	8:32:47 AM	SiCl4 post valve closed
3/13/2012	8:32:47 AM	Main Vac valve closed
3/13/2012	8:32:47 AM	Bypass valve closed
3/13/2012	8:32:47 AM	Bubbler valve closed
3/13/2012	8:32:47 AM	Helium MFC set to  0.000000
3/13/2012	8:32:47 AM	H2 MFC set to  0.000000
3/13/2012	8:32:47 AM	BCl3 MFC set to  0.000000
3/13/2012	8:32:47 AM	PH3 MFC set to  0.000000
3/13/2012	8:32:47 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:32:47 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:32:48 AM	Tube furnace set to 0
3/13/2012	8:32:51 AM	H2 valve closed
3/13/2012	8:32:51 AM	BCl3 valve closed
3/13/2012	8:32:51 AM	PH3 valve closed
3/13/2012	8:32:51 AM	SiCl4 pre valve closed
3/13/2012	8:32:51 AM	SiCl4 post valve closed
3/13/2012	8:32:51 AM	Main Vac valve closed
3/13/2012	8:32:51 AM	Bypass valve closed
3/13/2012	8:32:51 AM	Bubbler valve closed
3/13/2012	8:32:51 AM	Helium valve opened
3/13/2012	8:32:51 AM	Helium MFC set to  500.000000
3/13/2012	8:32:51 AM	H2 MFC set to  0.000000
3/13/2012	8:32:51 AM	BCl3 MFC set to  0.000000
3/13/2012	8:32:51 AM	PH3 MFC set to  0.000000
3/13/2012	8:32:51 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:32:51 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:32:51 AM	Tube furnace set to 0
3/13/2012	8:33:57 AM	Helium valve closed
3/13/2012	8:33:57 AM	H2 valve closed
3/13/2012	8:33:57 AM	BCl3 valve closed
3/13/2012	8:33:57 AM	PH3 valve closed
3/13/2012	8:33:57 AM	SiCl4 pre valve closed
3/13/2012	8:33:57 AM	SiCl4 post valve closed
3/13/2012	8:33:57 AM	Main Vac valve closed
3/13/2012	8:33:57 AM	Bypass valve closed
3/13/2012	8:33:57 AM	Bubbler valve closed
3/13/2012	8:33:57 AM	Helium MFC set to  0.000000
3/13/2012	8:33:57 AM	H2 MFC set to  0.000000
3/13/2012	8:33:57 AM	BCl3 MFC set to  0.000000
3/13/2012	8:33:57 AM	PH3 MFC set to  0.000000
3/13/2012	8:33:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:33:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:33:57 AM	Tube furnace set to 0
3/13/2012	8:33:58 AM	Run finished at 8:33 AM
3/13/2012	8:33:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	8:39:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	8:39:06 AM	Recipe started at 8:39 AM
3/13/2012	8:39:06 AM	Helium valve closed
3/13/2012	8:39:06 AM	H2 valve closed
3/13/2012	8:39:06 AM	BCl3 valve closed
3/13/2012	8:39:06 AM	PH3 valve closed
3/13/2012	8:39:06 AM	SiCl4 pre valve closed
3/13/2012	8:39:06 AM	SiCl4 post valve closed
3/13/2012	8:39:06 AM	Main Vac valve closed
3/13/2012	8:39:06 AM	Bubbler valve closed
3/13/2012	8:39:06 AM	Bypass valve opened
3/13/2012	8:39:06 AM	Helium MFC set to  0.000000
3/13/2012	8:39:06 AM	H2 MFC set to  0.000000
3/13/2012	8:39:06 AM	BCl3 MFC set to  0.000000
3/13/2012	8:39:06 AM	PH3 MFC set to  0.000000
3/13/2012	8:39:06 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:39:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:39:06 AM	Tube furnace set to 0
3/13/2012	8:40:09 AM	Helium valve closed
3/13/2012	8:40:09 AM	H2 valve closed
3/13/2012	8:40:09 AM	BCl3 valve closed
3/13/2012	8:40:09 AM	PH3 valve closed
3/13/2012	8:40:09 AM	SiCl4 pre valve closed
3/13/2012	8:40:09 AM	SiCl4 post valve closed
3/13/2012	8:40:09 AM	Main Vac valve closed
3/13/2012	8:40:09 AM	Bubbler valve closed
3/13/2012	8:40:09 AM	Bypass valve opened
3/13/2012	8:40:09 AM	Helium MFC set to  0.000000
3/13/2012	8:40:09 AM	H2 MFC set to  0.000000
3/13/2012	8:40:09 AM	BCl3 MFC set to  0.000000
3/13/2012	8:40:09 AM	PH3 MFC set to  0.000000
3/13/2012	8:40:09 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:40:09 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:40:10 AM	Tube furnace set to 0
3/13/2012	8:41:10 AM	Helium valve closed
3/13/2012	8:41:10 AM	H2 valve closed
3/13/2012	8:41:10 AM	BCl3 valve closed
3/13/2012	8:41:10 AM	PH3 valve closed
3/13/2012	8:41:10 AM	SiCl4 pre valve closed
3/13/2012	8:41:10 AM	SiCl4 post valve closed
3/13/2012	8:41:10 AM	Bypass valve closed
3/13/2012	8:41:10 AM	Bubbler valve closed
3/13/2012	8:41:10 AM	Main Vac valve opened
3/13/2012	8:41:10 AM	Helium MFC set to  0.000000
3/13/2012	8:41:10 AM	H2 MFC set to  0.000000
3/13/2012	8:41:10 AM	BCl3 MFC set to  0.000000
3/13/2012	8:41:10 AM	PH3 MFC set to  0.000000
3/13/2012	8:41:10 AM	SiCl4 MFC set to  0.000000
3/13/2012	8:41:10 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	8:41:10 AM	Tube furnace set to 0
3/13/2012	8:41:11 AM	Run finished at 8:41 AM
3/13/2012	8:41:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	9:04:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	9:04:22 AM	Recipe started at 9:04 AM
3/13/2012	9:04:22 AM	Helium valve closed
3/13/2012	9:04:22 AM	H2 valve closed
3/13/2012	9:04:22 AM	BCl3 valve closed
3/13/2012	9:04:22 AM	PH3 valve closed
3/13/2012	9:04:22 AM	SiCl4 pre valve closed
3/13/2012	9:04:22 AM	SiCl4 post valve closed
3/13/2012	9:04:22 AM	Main Vac valve closed
3/13/2012	9:04:22 AM	Bubbler valve closed
3/13/2012	9:04:22 AM	Bypass valve opened
3/13/2012	9:04:22 AM	Helium MFC set to  0.000000
3/13/2012	9:04:22 AM	H2 MFC set to  0.000000
3/13/2012	9:04:22 AM	BCl3 MFC set to  0.000000
3/13/2012	9:04:22 AM	PH3 MFC set to  0.000000
3/13/2012	9:04:22 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:04:22 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:04:22 AM	Tube furnace set to 0
3/13/2012	9:04:22 AM	Helium valve closed
3/13/2012	9:04:22 AM	H2 valve closed
3/13/2012	9:04:22 AM	BCl3 valve closed
3/13/2012	9:04:22 AM	PH3 valve closed
3/13/2012	9:04:22 AM	SiCl4 pre valve closed
3/13/2012	9:04:22 AM	SiCl4 post valve closed
3/13/2012	9:04:22 AM	Main Vac valve closed
3/13/2012	9:04:22 AM	Bubbler valve closed
3/13/2012	9:04:22 AM	Bypass valve opened
3/13/2012	9:04:22 AM	Helium MFC set to  0.000000
3/13/2012	9:04:22 AM	H2 MFC set to  0.000000
3/13/2012	9:04:22 AM	BCl3 MFC set to  0.000000
3/13/2012	9:04:22 AM	PH3 MFC set to  0.000000
3/13/2012	9:04:22 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:04:22 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:04:22 AM	Tube furnace set to 0
3/13/2012	9:04:25 AM	Helium valve closed
3/13/2012	9:04:25 AM	H2 valve closed
3/13/2012	9:04:25 AM	BCl3 valve closed
3/13/2012	9:04:25 AM	PH3 valve closed
3/13/2012	9:04:25 AM	SiCl4 pre valve closed
3/13/2012	9:04:25 AM	SiCl4 post valve closed
3/13/2012	9:04:25 AM	Bypass valve closed
3/13/2012	9:04:25 AM	Bubbler valve closed
3/13/2012	9:04:25 AM	Main Vac valve opened
3/13/2012	9:04:25 AM	Helium MFC set to  0.000000
3/13/2012	9:04:25 AM	H2 MFC set to  0.000000
3/13/2012	9:04:25 AM	BCl3 MFC set to  0.000000
3/13/2012	9:04:25 AM	PH3 MFC set to  0.000000
3/13/2012	9:04:25 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:04:25 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:04:25 AM	Tube furnace set to 0
3/13/2012	9:04:25 AM	H2 valve closed
3/13/2012	9:04:25 AM	BCl3 valve closed
3/13/2012	9:04:25 AM	PH3 valve closed
3/13/2012	9:04:25 AM	SiCl4 pre valve closed
3/13/2012	9:04:25 AM	SiCl4 post valve closed
3/13/2012	9:04:25 AM	Bypass valve closed
3/13/2012	9:04:25 AM	Bubbler valve closed
3/13/2012	9:04:25 AM	Helium valve opened
3/13/2012	9:04:25 AM	Main Vac valve opened
3/13/2012	9:04:25 AM	Helium MFC set to  20.000000
3/13/2012	9:04:25 AM	H2 MFC set to  0.000000
3/13/2012	9:04:25 AM	BCl3 MFC set to  0.000000
3/13/2012	9:04:25 AM	PH3 MFC set to  0.000000
3/13/2012	9:04:25 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:04:25 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:04:25 AM	Tube furnace set to 0
3/13/2012	9:04:55 AM	Helium valve closed
3/13/2012	9:04:55 AM	H2 valve closed
3/13/2012	9:04:55 AM	BCl3 valve closed
3/13/2012	9:04:55 AM	PH3 valve closed
3/13/2012	9:04:55 AM	SiCl4 pre valve closed
3/13/2012	9:04:55 AM	SiCl4 post valve closed
3/13/2012	9:04:55 AM	Bypass valve closed
3/13/2012	9:04:55 AM	Bubbler valve closed
3/13/2012	9:04:55 AM	Main Vac valve opened
3/13/2012	9:04:55 AM	Helium MFC set to  0.000000
3/13/2012	9:04:55 AM	H2 MFC set to  0.000000
3/13/2012	9:04:55 AM	BCl3 MFC set to  0.000000
3/13/2012	9:04:55 AM	PH3 MFC set to  0.000000
3/13/2012	9:04:55 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:04:55 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:04:56 AM	Tube furnace set to 0
3/13/2012	9:05:26 AM	H2 valve closed
3/13/2012	9:05:26 AM	BCl3 valve closed
3/13/2012	9:05:26 AM	PH3 valve closed
3/13/2012	9:05:26 AM	SiCl4 pre valve closed
3/13/2012	9:05:26 AM	SiCl4 post valve closed
3/13/2012	9:05:26 AM	Bypass valve closed
3/13/2012	9:05:26 AM	Bubbler valve closed
3/13/2012	9:05:26 AM	Helium valve opened
3/13/2012	9:05:26 AM	Main Vac valve opened
3/13/2012	9:05:26 AM	Helium MFC set to  20.000000
3/13/2012	9:05:26 AM	H2 MFC set to  0.000000
3/13/2012	9:05:26 AM	BCl3 MFC set to  0.000000
3/13/2012	9:05:26 AM	PH3 MFC set to  0.000000
3/13/2012	9:05:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:05:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:05:26 AM	Tube furnace set to 0
3/13/2012	9:05:56 AM	Helium valve closed
3/13/2012	9:05:56 AM	H2 valve closed
3/13/2012	9:05:56 AM	BCl3 valve closed
3/13/2012	9:05:56 AM	PH3 valve closed
3/13/2012	9:05:56 AM	SiCl4 pre valve closed
3/13/2012	9:05:56 AM	SiCl4 post valve closed
3/13/2012	9:05:56 AM	Bypass valve closed
3/13/2012	9:05:56 AM	Bubbler valve closed
3/13/2012	9:05:56 AM	Main Vac valve opened
3/13/2012	9:05:56 AM	Helium MFC set to  0.000000
3/13/2012	9:05:56 AM	H2 MFC set to  0.000000
3/13/2012	9:05:56 AM	BCl3 MFC set to  0.000000
3/13/2012	9:05:56 AM	PH3 MFC set to  0.000000
3/13/2012	9:05:56 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:05:56 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:05:56 AM	Tube furnace set to 0
3/13/2012	9:06:26 AM	H2 valve closed
3/13/2012	9:06:26 AM	BCl3 valve closed
3/13/2012	9:06:26 AM	PH3 valve closed
3/13/2012	9:06:26 AM	SiCl4 pre valve closed
3/13/2012	9:06:26 AM	SiCl4 post valve closed
3/13/2012	9:06:26 AM	Bypass valve closed
3/13/2012	9:06:26 AM	Bubbler valve closed
3/13/2012	9:06:26 AM	Helium valve opened
3/13/2012	9:06:26 AM	Main Vac valve opened
3/13/2012	9:06:26 AM	Helium MFC set to  20.000000
3/13/2012	9:06:26 AM	H2 MFC set to  0.000000
3/13/2012	9:06:26 AM	BCl3 MFC set to  0.000000
3/13/2012	9:06:26 AM	PH3 MFC set to  0.000000
3/13/2012	9:06:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:06:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:06:26 AM	Tube furnace set to 0
3/13/2012	9:06:56 AM	Helium valve closed
3/13/2012	9:06:56 AM	H2 valve closed
3/13/2012	9:06:56 AM	BCl3 valve closed
3/13/2012	9:06:56 AM	PH3 valve closed
3/13/2012	9:06:56 AM	SiCl4 pre valve closed
3/13/2012	9:06:56 AM	SiCl4 post valve closed
3/13/2012	9:06:56 AM	Bypass valve closed
3/13/2012	9:06:56 AM	Bubbler valve closed
3/13/2012	9:06:56 AM	Main Vac valve opened
3/13/2012	9:06:56 AM	Helium MFC set to  0.000000
3/13/2012	9:06:56 AM	H2 MFC set to  0.000000
3/13/2012	9:06:56 AM	BCl3 MFC set to  0.000000
3/13/2012	9:06:56 AM	PH3 MFC set to  0.000000
3/13/2012	9:06:56 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:06:56 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:06:56 AM	Tube furnace set to 0
3/13/2012	9:07:26 AM	H2 valve closed
3/13/2012	9:07:26 AM	BCl3 valve closed
3/13/2012	9:07:26 AM	PH3 valve closed
3/13/2012	9:07:26 AM	SiCl4 pre valve closed
3/13/2012	9:07:26 AM	SiCl4 post valve closed
3/13/2012	9:07:26 AM	Bypass valve closed
3/13/2012	9:07:26 AM	Bubbler valve closed
3/13/2012	9:07:26 AM	Helium valve opened
3/13/2012	9:07:26 AM	Main Vac valve opened
3/13/2012	9:07:26 AM	Helium MFC set to  20.000000
3/13/2012	9:07:26 AM	H2 MFC set to  0.000000
3/13/2012	9:07:26 AM	BCl3 MFC set to  0.000000
3/13/2012	9:07:26 AM	PH3 MFC set to  0.000000
3/13/2012	9:07:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:07:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:07:27 AM	Tube furnace set to 0
3/13/2012	9:07:57 AM	Helium valve closed
3/13/2012	9:07:57 AM	H2 valve closed
3/13/2012	9:07:57 AM	BCl3 valve closed
3/13/2012	9:07:57 AM	PH3 valve closed
3/13/2012	9:07:57 AM	SiCl4 pre valve closed
3/13/2012	9:07:57 AM	SiCl4 post valve closed
3/13/2012	9:07:57 AM	Bypass valve closed
3/13/2012	9:07:57 AM	Bubbler valve closed
3/13/2012	9:07:57 AM	Main Vac valve opened
3/13/2012	9:07:57 AM	Helium MFC set to  0.000000
3/13/2012	9:07:57 AM	H2 MFC set to  0.000000
3/13/2012	9:07:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:07:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:07:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:07:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:07:57 AM	Tube furnace set to 0
3/13/2012	9:08:27 AM	H2 valve closed
3/13/2012	9:08:27 AM	BCl3 valve closed
3/13/2012	9:08:27 AM	PH3 valve closed
3/13/2012	9:08:27 AM	SiCl4 pre valve closed
3/13/2012	9:08:27 AM	SiCl4 post valve closed
3/13/2012	9:08:27 AM	Bypass valve closed
3/13/2012	9:08:27 AM	Bubbler valve closed
3/13/2012	9:08:27 AM	Helium valve opened
3/13/2012	9:08:27 AM	Main Vac valve opened
3/13/2012	9:08:27 AM	Helium MFC set to  20.000000
3/13/2012	9:08:27 AM	H2 MFC set to  0.000000
3/13/2012	9:08:27 AM	BCl3 MFC set to  0.000000
3/13/2012	9:08:27 AM	PH3 MFC set to  0.000000
3/13/2012	9:08:27 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:08:27 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:08:27 AM	Tube furnace set to 0
3/13/2012	9:08:57 AM	Helium valve closed
3/13/2012	9:08:57 AM	H2 valve closed
3/13/2012	9:08:57 AM	BCl3 valve closed
3/13/2012	9:08:57 AM	PH3 valve closed
3/13/2012	9:08:57 AM	SiCl4 pre valve closed
3/13/2012	9:08:57 AM	SiCl4 post valve closed
3/13/2012	9:08:57 AM	Bypass valve closed
3/13/2012	9:08:57 AM	Bubbler valve closed
3/13/2012	9:08:57 AM	Main Vac valve opened
3/13/2012	9:08:57 AM	Helium MFC set to  0.000000
3/13/2012	9:08:57 AM	H2 MFC set to  0.000000
3/13/2012	9:08:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:08:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:08:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:08:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:08:57 AM	Tube furnace set to 0
3/13/2012	9:09:27 AM	H2 valve closed
3/13/2012	9:09:27 AM	BCl3 valve closed
3/13/2012	9:09:27 AM	PH3 valve closed
3/13/2012	9:09:27 AM	SiCl4 pre valve closed
3/13/2012	9:09:27 AM	SiCl4 post valve closed
3/13/2012	9:09:27 AM	Bypass valve closed
3/13/2012	9:09:27 AM	Bubbler valve closed
3/13/2012	9:09:27 AM	Helium valve opened
3/13/2012	9:09:27 AM	Main Vac valve opened
3/13/2012	9:09:27 AM	Helium MFC set to  20.000000
3/13/2012	9:09:27 AM	H2 MFC set to  0.000000
3/13/2012	9:09:27 AM	BCl3 MFC set to  0.000000
3/13/2012	9:09:27 AM	PH3 MFC set to  0.000000
3/13/2012	9:09:27 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:09:27 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:09:27 AM	Tube furnace set to 0
3/13/2012	9:09:57 AM	Helium valve closed
3/13/2012	9:09:57 AM	H2 valve closed
3/13/2012	9:09:57 AM	BCl3 valve closed
3/13/2012	9:09:57 AM	PH3 valve closed
3/13/2012	9:09:57 AM	SiCl4 pre valve closed
3/13/2012	9:09:57 AM	SiCl4 post valve closed
3/13/2012	9:09:57 AM	Bypass valve closed
3/13/2012	9:09:57 AM	Bubbler valve closed
3/13/2012	9:09:57 AM	Main Vac valve opened
3/13/2012	9:09:57 AM	Helium MFC set to  0.000000
3/13/2012	9:09:57 AM	H2 MFC set to  0.000000
3/13/2012	9:09:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:09:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:09:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:09:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:09:58 AM	Tube furnace set to 0
3/13/2012	9:10:28 AM	H2 valve closed
3/13/2012	9:10:28 AM	BCl3 valve closed
3/13/2012	9:10:28 AM	PH3 valve closed
3/13/2012	9:10:28 AM	SiCl4 pre valve closed
3/13/2012	9:10:28 AM	SiCl4 post valve closed
3/13/2012	9:10:28 AM	Bypass valve closed
3/13/2012	9:10:28 AM	Bubbler valve closed
3/13/2012	9:10:28 AM	Helium valve opened
3/13/2012	9:10:28 AM	Main Vac valve opened
3/13/2012	9:10:28 AM	Helium MFC set to  20.000000
3/13/2012	9:10:28 AM	H2 MFC set to  0.000000
3/13/2012	9:10:28 AM	BCl3 MFC set to  0.000000
3/13/2012	9:10:28 AM	PH3 MFC set to  0.000000
3/13/2012	9:10:28 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:10:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:10:28 AM	Tube furnace set to 0
3/13/2012	9:10:58 AM	Helium valve closed
3/13/2012	9:10:58 AM	H2 valve closed
3/13/2012	9:10:58 AM	BCl3 valve closed
3/13/2012	9:10:58 AM	PH3 valve closed
3/13/2012	9:10:58 AM	SiCl4 pre valve closed
3/13/2012	9:10:58 AM	SiCl4 post valve closed
3/13/2012	9:10:58 AM	Bypass valve closed
3/13/2012	9:10:58 AM	Bubbler valve closed
3/13/2012	9:10:58 AM	Main Vac valve opened
3/13/2012	9:10:58 AM	Helium MFC set to  0.000000
3/13/2012	9:10:58 AM	H2 MFC set to  0.000000
3/13/2012	9:10:58 AM	BCl3 MFC set to  0.000000
3/13/2012	9:10:58 AM	PH3 MFC set to  0.000000
3/13/2012	9:10:58 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:10:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:10:58 AM	Tube furnace set to 0
3/13/2012	9:11:28 AM	H2 valve closed
3/13/2012	9:11:28 AM	BCl3 valve closed
3/13/2012	9:11:28 AM	PH3 valve closed
3/13/2012	9:11:28 AM	SiCl4 pre valve closed
3/13/2012	9:11:28 AM	SiCl4 post valve closed
3/13/2012	9:11:28 AM	Bypass valve closed
3/13/2012	9:11:28 AM	Bubbler valve closed
3/13/2012	9:11:28 AM	Helium valve opened
3/13/2012	9:11:28 AM	Main Vac valve opened
3/13/2012	9:11:28 AM	Helium MFC set to  20.000000
3/13/2012	9:11:28 AM	H2 MFC set to  0.000000
3/13/2012	9:11:28 AM	BCl3 MFC set to  0.000000
3/13/2012	9:11:28 AM	PH3 MFC set to  0.000000
3/13/2012	9:11:28 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:11:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:11:28 AM	Tube furnace set to 0
3/13/2012	9:11:58 AM	Helium valve closed
3/13/2012	9:11:58 AM	H2 valve closed
3/13/2012	9:11:58 AM	BCl3 valve closed
3/13/2012	9:11:58 AM	PH3 valve closed
3/13/2012	9:11:58 AM	SiCl4 pre valve closed
3/13/2012	9:11:58 AM	SiCl4 post valve closed
3/13/2012	9:11:58 AM	Bypass valve closed
3/13/2012	9:11:58 AM	Bubbler valve closed
3/13/2012	9:11:58 AM	Main Vac valve opened
3/13/2012	9:11:58 AM	Helium MFC set to  0.000000
3/13/2012	9:11:58 AM	H2 MFC set to  0.000000
3/13/2012	9:11:58 AM	BCl3 MFC set to  0.000000
3/13/2012	9:11:58 AM	PH3 MFC set to  0.000000
3/13/2012	9:11:58 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:11:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:11:58 AM	Tube furnace set to 0
3/13/2012	9:12:28 AM	H2 valve closed
3/13/2012	9:12:28 AM	BCl3 valve closed
3/13/2012	9:12:28 AM	PH3 valve closed
3/13/2012	9:12:28 AM	SiCl4 pre valve closed
3/13/2012	9:12:28 AM	SiCl4 post valve closed
3/13/2012	9:12:28 AM	Bypass valve closed
3/13/2012	9:12:28 AM	Bubbler valve closed
3/13/2012	9:12:28 AM	Helium valve opened
3/13/2012	9:12:29 AM	Main Vac valve opened
3/13/2012	9:12:29 AM	Helium MFC set to  20.000000
3/13/2012	9:12:29 AM	H2 MFC set to  0.000000
3/13/2012	9:12:29 AM	BCl3 MFC set to  0.000000
3/13/2012	9:12:29 AM	PH3 MFC set to  0.000000
3/13/2012	9:12:29 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:12:29 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:12:29 AM	Tube furnace set to 0
3/13/2012	9:12:59 AM	Helium valve closed
3/13/2012	9:12:59 AM	H2 valve closed
3/13/2012	9:12:59 AM	BCl3 valve closed
3/13/2012	9:12:59 AM	PH3 valve closed
3/13/2012	9:12:59 AM	SiCl4 pre valve closed
3/13/2012	9:12:59 AM	SiCl4 post valve closed
3/13/2012	9:12:59 AM	Bypass valve closed
3/13/2012	9:12:59 AM	Bubbler valve closed
3/13/2012	9:12:59 AM	Main Vac valve opened
3/13/2012	9:12:59 AM	Helium MFC set to  0.000000
3/13/2012	9:12:59 AM	H2 MFC set to  0.000000
3/13/2012	9:12:59 AM	BCl3 MFC set to  0.000000
3/13/2012	9:12:59 AM	PH3 MFC set to  0.000000
3/13/2012	9:12:59 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:12:59 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:12:59 AM	Tube furnace set to 0
3/13/2012	9:13:29 AM	H2 valve closed
3/13/2012	9:13:29 AM	BCl3 valve closed
3/13/2012	9:13:29 AM	PH3 valve closed
3/13/2012	9:13:29 AM	SiCl4 pre valve closed
3/13/2012	9:13:29 AM	SiCl4 post valve closed
3/13/2012	9:13:29 AM	Bypass valve closed
3/13/2012	9:13:29 AM	Bubbler valve closed
3/13/2012	9:13:29 AM	Helium valve opened
3/13/2012	9:13:29 AM	Main Vac valve opened
3/13/2012	9:13:29 AM	Helium MFC set to  20.000000
3/13/2012	9:13:29 AM	H2 MFC set to  0.000000
3/13/2012	9:13:29 AM	BCl3 MFC set to  0.000000
3/13/2012	9:13:29 AM	PH3 MFC set to  0.000000
3/13/2012	9:13:29 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:13:29 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:13:29 AM	Tube furnace set to 0
3/13/2012	9:13:59 AM	Helium valve closed
3/13/2012	9:13:59 AM	H2 valve closed
3/13/2012	9:13:59 AM	BCl3 valve closed
3/13/2012	9:13:59 AM	PH3 valve closed
3/13/2012	9:13:59 AM	SiCl4 pre valve closed
3/13/2012	9:13:59 AM	SiCl4 post valve closed
3/13/2012	9:13:59 AM	Bypass valve closed
3/13/2012	9:13:59 AM	Bubbler valve closed
3/13/2012	9:13:59 AM	Main Vac valve opened
3/13/2012	9:13:59 AM	Helium MFC set to  0.000000
3/13/2012	9:13:59 AM	H2 MFC set to  0.000000
3/13/2012	9:13:59 AM	BCl3 MFC set to  0.000000
3/13/2012	9:13:59 AM	PH3 MFC set to  0.000000
3/13/2012	9:13:59 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:13:59 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:13:59 AM	Tube furnace set to 0
3/13/2012	9:14:00 AM	Run finished at 9:14 AM
3/13/2012	9:14:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	9:17:26 AM	Main Vac valve closed
3/13/2012	9:17:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	9:17:51 AM	Recipe started at 9:17 AM
3/13/2012	9:17:51 AM	Helium valve closed
3/13/2012	9:17:51 AM	H2 valve closed
3/13/2012	9:17:51 AM	BCl3 valve closed
3/13/2012	9:17:51 AM	PH3 valve closed
3/13/2012	9:17:51 AM	SiCl4 pre valve closed
3/13/2012	9:17:51 AM	SiCl4 post valve closed
3/13/2012	9:17:51 AM	Main Vac valve closed
3/13/2012	9:17:51 AM	Bubbler valve closed
3/13/2012	9:17:51 AM	Bypass valve opened
3/13/2012	9:17:51 AM	Helium MFC set to  0.000000
3/13/2012	9:17:51 AM	H2 MFC set to  0.000000
3/13/2012	9:17:51 AM	BCl3 MFC set to  0.000000
3/13/2012	9:17:51 AM	PH3 MFC set to  0.000000
3/13/2012	9:17:51 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:17:51 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:17:51 AM	Tube furnace set to 0
3/13/2012	9:17:52 AM	Helium valve closed
3/13/2012	9:17:52 AM	H2 valve closed
3/13/2012	9:17:52 AM	BCl3 valve closed
3/13/2012	9:17:52 AM	PH3 valve closed
3/13/2012	9:17:52 AM	SiCl4 pre valve closed
3/13/2012	9:17:52 AM	SiCl4 post valve closed
3/13/2012	9:17:52 AM	Main Vac valve closed
3/13/2012	9:17:52 AM	Bubbler valve closed
3/13/2012	9:17:52 AM	Bypass valve opened
3/13/2012	9:17:52 AM	Helium MFC set to  0.000000
3/13/2012	9:17:52 AM	H2 MFC set to  0.000000
3/13/2012	9:17:52 AM	BCl3 MFC set to  0.000000
3/13/2012	9:17:52 AM	PH3 MFC set to  0.000000
3/13/2012	9:17:52 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:17:52 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:17:52 AM	Tube furnace set to 0
3/13/2012	9:17:54 AM	Helium valve closed
3/13/2012	9:17:54 AM	H2 valve closed
3/13/2012	9:17:54 AM	BCl3 valve closed
3/13/2012	9:17:54 AM	PH3 valve closed
3/13/2012	9:17:54 AM	SiCl4 pre valve closed
3/13/2012	9:17:54 AM	SiCl4 post valve closed
3/13/2012	9:17:54 AM	Bypass valve closed
3/13/2012	9:17:54 AM	Bubbler valve closed
3/13/2012	9:17:54 AM	Main Vac valve opened
3/13/2012	9:17:54 AM	Helium MFC set to  0.000000
3/13/2012	9:17:54 AM	H2 MFC set to  0.000000
3/13/2012	9:17:54 AM	BCl3 MFC set to  0.000000
3/13/2012	9:17:54 AM	PH3 MFC set to  0.000000
3/13/2012	9:17:54 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:17:54 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:17:54 AM	Tube furnace set to 0
3/13/2012	9:17:55 AM	H2 valve closed
3/13/2012	9:17:55 AM	BCl3 valve closed
3/13/2012	9:17:55 AM	PH3 valve closed
3/13/2012	9:17:55 AM	SiCl4 pre valve closed
3/13/2012	9:17:55 AM	SiCl4 post valve closed
3/13/2012	9:17:55 AM	Bypass valve closed
3/13/2012	9:17:55 AM	Bubbler valve closed
3/13/2012	9:17:55 AM	Helium valve opened
3/13/2012	9:17:55 AM	Main Vac valve opened
3/13/2012	9:17:55 AM	Helium MFC set to  20.000000
3/13/2012	9:17:55 AM	H2 MFC set to  0.000000
3/13/2012	9:17:55 AM	BCl3 MFC set to  0.000000
3/13/2012	9:17:55 AM	PH3 MFC set to  0.000000
3/13/2012	9:17:55 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:17:55 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:17:55 AM	Tube furnace set to 0
3/13/2012	9:18:25 AM	Helium valve closed
3/13/2012	9:18:25 AM	H2 valve closed
3/13/2012	9:18:25 AM	BCl3 valve closed
3/13/2012	9:18:25 AM	PH3 valve closed
3/13/2012	9:18:25 AM	SiCl4 pre valve closed
3/13/2012	9:18:25 AM	SiCl4 post valve closed
3/13/2012	9:18:25 AM	Bypass valve closed
3/13/2012	9:18:25 AM	Bubbler valve closed
3/13/2012	9:18:25 AM	Main Vac valve opened
3/13/2012	9:18:25 AM	Helium MFC set to  0.000000
3/13/2012	9:18:25 AM	H2 MFC set to  0.000000
3/13/2012	9:18:25 AM	BCl3 MFC set to  0.000000
3/13/2012	9:18:25 AM	PH3 MFC set to  0.000000
3/13/2012	9:18:25 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:18:25 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:18:25 AM	Tube furnace set to 0
3/13/2012	9:18:55 AM	H2 valve closed
3/13/2012	9:18:55 AM	BCl3 valve closed
3/13/2012	9:18:55 AM	PH3 valve closed
3/13/2012	9:18:55 AM	SiCl4 pre valve closed
3/13/2012	9:18:55 AM	SiCl4 post valve closed
3/13/2012	9:18:55 AM	Bypass valve closed
3/13/2012	9:18:55 AM	Bubbler valve closed
3/13/2012	9:18:55 AM	Helium valve opened
3/13/2012	9:18:55 AM	Main Vac valve opened
3/13/2012	9:18:55 AM	Helium MFC set to  20.000000
3/13/2012	9:18:55 AM	H2 MFC set to  0.000000
3/13/2012	9:18:55 AM	BCl3 MFC set to  0.000000
3/13/2012	9:18:55 AM	PH3 MFC set to  0.000000
3/13/2012	9:18:55 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:18:55 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:18:55 AM	Tube furnace set to 0
3/13/2012	9:19:25 AM	Helium valve closed
3/13/2012	9:19:25 AM	H2 valve closed
3/13/2012	9:19:25 AM	BCl3 valve closed
3/13/2012	9:19:25 AM	PH3 valve closed
3/13/2012	9:19:25 AM	SiCl4 pre valve closed
3/13/2012	9:19:25 AM	SiCl4 post valve closed
3/13/2012	9:19:25 AM	Bypass valve closed
3/13/2012	9:19:25 AM	Bubbler valve closed
3/13/2012	9:19:25 AM	Main Vac valve opened
3/13/2012	9:19:25 AM	Helium MFC set to  0.000000
3/13/2012	9:19:25 AM	H2 MFC set to  0.000000
3/13/2012	9:19:25 AM	BCl3 MFC set to  0.000000
3/13/2012	9:19:25 AM	PH3 MFC set to  0.000000
3/13/2012	9:19:25 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:19:25 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:19:26 AM	Tube furnace set to 0
3/13/2012	9:19:56 AM	H2 valve closed
3/13/2012	9:19:56 AM	BCl3 valve closed
3/13/2012	9:19:56 AM	PH3 valve closed
3/13/2012	9:19:56 AM	SiCl4 pre valve closed
3/13/2012	9:19:56 AM	SiCl4 post valve closed
3/13/2012	9:19:56 AM	Bypass valve closed
3/13/2012	9:19:56 AM	Bubbler valve closed
3/13/2012	9:19:56 AM	Helium valve opened
3/13/2012	9:19:56 AM	Main Vac valve opened
3/13/2012	9:19:56 AM	Helium MFC set to  20.000000
3/13/2012	9:19:56 AM	H2 MFC set to  0.000000
3/13/2012	9:19:56 AM	BCl3 MFC set to  0.000000
3/13/2012	9:19:56 AM	PH3 MFC set to  0.000000
3/13/2012	9:19:56 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:19:56 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:19:56 AM	Tube furnace set to 0
3/13/2012	9:20:26 AM	Helium valve closed
3/13/2012	9:20:26 AM	H2 valve closed
3/13/2012	9:20:26 AM	BCl3 valve closed
3/13/2012	9:20:26 AM	PH3 valve closed
3/13/2012	9:20:26 AM	SiCl4 pre valve closed
3/13/2012	9:20:26 AM	SiCl4 post valve closed
3/13/2012	9:20:26 AM	Bypass valve closed
3/13/2012	9:20:26 AM	Bubbler valve closed
3/13/2012	9:20:26 AM	Main Vac valve opened
3/13/2012	9:20:26 AM	Helium MFC set to  0.000000
3/13/2012	9:20:26 AM	H2 MFC set to  0.000000
3/13/2012	9:20:26 AM	BCl3 MFC set to  0.000000
3/13/2012	9:20:26 AM	PH3 MFC set to  0.000000
3/13/2012	9:20:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:20:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:20:26 AM	Tube furnace set to 0
3/13/2012	9:20:56 AM	H2 valve closed
3/13/2012	9:20:56 AM	BCl3 valve closed
3/13/2012	9:20:56 AM	PH3 valve closed
3/13/2012	9:20:56 AM	SiCl4 pre valve closed
3/13/2012	9:20:56 AM	SiCl4 post valve closed
3/13/2012	9:20:56 AM	Bypass valve closed
3/13/2012	9:20:56 AM	Bubbler valve closed
3/13/2012	9:20:56 AM	Helium valve opened
3/13/2012	9:20:56 AM	Main Vac valve opened
3/13/2012	9:20:56 AM	Helium MFC set to  20.000000
3/13/2012	9:20:56 AM	H2 MFC set to  0.000000
3/13/2012	9:20:56 AM	BCl3 MFC set to  0.000000
3/13/2012	9:20:56 AM	PH3 MFC set to  0.000000
3/13/2012	9:20:56 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:20:56 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:20:56 AM	Tube furnace set to 0
3/13/2012	9:21:26 AM	Helium valve closed
3/13/2012	9:21:26 AM	H2 valve closed
3/13/2012	9:21:26 AM	BCl3 valve closed
3/13/2012	9:21:26 AM	PH3 valve closed
3/13/2012	9:21:26 AM	SiCl4 pre valve closed
3/13/2012	9:21:26 AM	SiCl4 post valve closed
3/13/2012	9:21:26 AM	Bypass valve closed
3/13/2012	9:21:26 AM	Bubbler valve closed
3/13/2012	9:21:26 AM	Main Vac valve opened
3/13/2012	9:21:26 AM	Helium MFC set to  0.000000
3/13/2012	9:21:26 AM	H2 MFC set to  0.000000
3/13/2012	9:21:26 AM	BCl3 MFC set to  0.000000
3/13/2012	9:21:26 AM	PH3 MFC set to  0.000000
3/13/2012	9:21:26 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:21:26 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:21:26 AM	Tube furnace set to 0
3/13/2012	9:21:56 AM	H2 valve closed
3/13/2012	9:21:56 AM	BCl3 valve closed
3/13/2012	9:21:56 AM	PH3 valve closed
3/13/2012	9:21:56 AM	SiCl4 pre valve closed
3/13/2012	9:21:56 AM	SiCl4 post valve closed
3/13/2012	9:21:56 AM	Bypass valve closed
3/13/2012	9:21:56 AM	Bubbler valve closed
3/13/2012	9:21:56 AM	Helium valve opened
3/13/2012	9:21:56 AM	Main Vac valve opened
3/13/2012	9:21:57 AM	Helium MFC set to  20.000000
3/13/2012	9:21:57 AM	H2 MFC set to  0.000000
3/13/2012	9:21:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:21:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:21:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:21:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:21:57 AM	Tube furnace set to 0
3/13/2012	9:22:27 AM	Helium valve closed
3/13/2012	9:22:27 AM	H2 valve closed
3/13/2012	9:22:27 AM	BCl3 valve closed
3/13/2012	9:22:27 AM	PH3 valve closed
3/13/2012	9:22:27 AM	SiCl4 pre valve closed
3/13/2012	9:22:27 AM	SiCl4 post valve closed
3/13/2012	9:22:27 AM	Bypass valve closed
3/13/2012	9:22:27 AM	Bubbler valve closed
3/13/2012	9:22:27 AM	Main Vac valve opened
3/13/2012	9:22:27 AM	Helium MFC set to  0.000000
3/13/2012	9:22:27 AM	H2 MFC set to  0.000000
3/13/2012	9:22:27 AM	BCl3 MFC set to  0.000000
3/13/2012	9:22:27 AM	PH3 MFC set to  0.000000
3/13/2012	9:22:27 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:22:27 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:22:27 AM	Tube furnace set to 0
3/13/2012	9:22:57 AM	H2 valve closed
3/13/2012	9:22:57 AM	BCl3 valve closed
3/13/2012	9:22:57 AM	PH3 valve closed
3/13/2012	9:22:57 AM	SiCl4 pre valve closed
3/13/2012	9:22:57 AM	SiCl4 post valve closed
3/13/2012	9:22:57 AM	Bypass valve closed
3/13/2012	9:22:57 AM	Bubbler valve closed
3/13/2012	9:22:57 AM	Helium valve opened
3/13/2012	9:22:57 AM	Main Vac valve opened
3/13/2012	9:22:57 AM	Helium MFC set to  20.000000
3/13/2012	9:22:57 AM	H2 MFC set to  0.000000
3/13/2012	9:22:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:22:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:22:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:22:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:22:57 AM	Tube furnace set to 0
3/13/2012	9:23:27 AM	Helium valve closed
3/13/2012	9:23:27 AM	H2 valve closed
3/13/2012	9:23:27 AM	BCl3 valve closed
3/13/2012	9:23:27 AM	PH3 valve closed
3/13/2012	9:23:27 AM	SiCl4 pre valve closed
3/13/2012	9:23:27 AM	SiCl4 post valve closed
3/13/2012	9:23:27 AM	Bypass valve closed
3/13/2012	9:23:27 AM	Bubbler valve closed
3/13/2012	9:23:27 AM	Main Vac valve opened
3/13/2012	9:23:27 AM	Helium MFC set to  0.000000
3/13/2012	9:23:27 AM	H2 MFC set to  0.000000
3/13/2012	9:23:27 AM	BCl3 MFC set to  0.000000
3/13/2012	9:23:27 AM	PH3 MFC set to  0.000000
3/13/2012	9:23:27 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:23:27 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:23:27 AM	Tube furnace set to 0
3/13/2012	9:23:57 AM	H2 valve closed
3/13/2012	9:23:57 AM	BCl3 valve closed
3/13/2012	9:23:57 AM	PH3 valve closed
3/13/2012	9:23:57 AM	SiCl4 pre valve closed
3/13/2012	9:23:57 AM	SiCl4 post valve closed
3/13/2012	9:23:57 AM	Bypass valve closed
3/13/2012	9:23:57 AM	Bubbler valve closed
3/13/2012	9:23:57 AM	Helium valve opened
3/13/2012	9:23:57 AM	Main Vac valve opened
3/13/2012	9:23:57 AM	Helium MFC set to  20.000000
3/13/2012	9:23:57 AM	H2 MFC set to  0.000000
3/13/2012	9:23:57 AM	BCl3 MFC set to  0.000000
3/13/2012	9:23:57 AM	PH3 MFC set to  0.000000
3/13/2012	9:23:57 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:23:57 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:23:58 AM	Tube furnace set to 0
3/13/2012	9:24:28 AM	Helium valve closed
3/13/2012	9:24:28 AM	H2 valve closed
3/13/2012	9:24:28 AM	BCl3 valve closed
3/13/2012	9:24:28 AM	PH3 valve closed
3/13/2012	9:24:28 AM	SiCl4 pre valve closed
3/13/2012	9:24:28 AM	SiCl4 post valve closed
3/13/2012	9:24:28 AM	Bypass valve closed
3/13/2012	9:24:28 AM	Bubbler valve closed
3/13/2012	9:24:28 AM	Main Vac valve opened
3/13/2012	9:24:28 AM	Helium MFC set to  0.000000
3/13/2012	9:24:28 AM	H2 MFC set to  0.000000
3/13/2012	9:24:28 AM	BCl3 MFC set to  0.000000
3/13/2012	9:24:28 AM	PH3 MFC set to  0.000000
3/13/2012	9:24:28 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:24:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:24:28 AM	Tube furnace set to 0
3/13/2012	9:24:58 AM	H2 valve closed
3/13/2012	9:24:58 AM	BCl3 valve closed
3/13/2012	9:24:58 AM	PH3 valve closed
3/13/2012	9:24:58 AM	SiCl4 pre valve closed
3/13/2012	9:24:58 AM	SiCl4 post valve closed
3/13/2012	9:24:58 AM	Bypass valve closed
3/13/2012	9:24:58 AM	Bubbler valve closed
3/13/2012	9:24:58 AM	Helium valve opened
3/13/2012	9:24:58 AM	Main Vac valve opened
3/13/2012	9:24:58 AM	Helium MFC set to  20.000000
3/13/2012	9:24:58 AM	H2 MFC set to  0.000000
3/13/2012	9:24:58 AM	BCl3 MFC set to  0.000000
3/13/2012	9:24:58 AM	PH3 MFC set to  0.000000
3/13/2012	9:24:58 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:24:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:24:58 AM	Tube furnace set to 0
3/13/2012	9:25:28 AM	Helium valve closed
3/13/2012	9:25:28 AM	H2 valve closed
3/13/2012	9:25:28 AM	BCl3 valve closed
3/13/2012	9:25:28 AM	PH3 valve closed
3/13/2012	9:25:28 AM	SiCl4 pre valve closed
3/13/2012	9:25:28 AM	SiCl4 post valve closed
3/13/2012	9:25:28 AM	Bypass valve closed
3/13/2012	9:25:28 AM	Bubbler valve closed
3/13/2012	9:25:28 AM	Main Vac valve opened
3/13/2012	9:25:28 AM	Helium MFC set to  0.000000
3/13/2012	9:25:28 AM	H2 MFC set to  0.000000
3/13/2012	9:25:28 AM	BCl3 MFC set to  0.000000
3/13/2012	9:25:28 AM	PH3 MFC set to  0.000000
3/13/2012	9:25:28 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:25:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:25:28 AM	Tube furnace set to 0
3/13/2012	9:25:58 AM	H2 valve closed
3/13/2012	9:25:58 AM	BCl3 valve closed
3/13/2012	9:25:58 AM	PH3 valve closed
3/13/2012	9:25:58 AM	SiCl4 pre valve closed
3/13/2012	9:25:58 AM	SiCl4 post valve closed
3/13/2012	9:25:58 AM	Bypass valve closed
3/13/2012	9:25:58 AM	Bubbler valve closed
3/13/2012	9:25:58 AM	Helium valve opened
3/13/2012	9:25:58 AM	Main Vac valve opened
3/13/2012	9:25:58 AM	Helium MFC set to  20.000000
3/13/2012	9:25:58 AM	H2 MFC set to  0.000000
3/13/2012	9:25:58 AM	BCl3 MFC set to  0.000000
3/13/2012	9:25:58 AM	PH3 MFC set to  0.000000
3/13/2012	9:25:58 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:25:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:25:58 AM	Tube furnace set to 0
3/13/2012	9:26:28 AM	Helium valve closed
3/13/2012	9:26:28 AM	H2 valve closed
3/13/2012	9:26:28 AM	BCl3 valve closed
3/13/2012	9:26:28 AM	PH3 valve closed
3/13/2012	9:26:28 AM	SiCl4 pre valve closed
3/13/2012	9:26:28 AM	SiCl4 post valve closed
3/13/2012	9:26:28 AM	Bypass valve closed
3/13/2012	9:26:28 AM	Bubbler valve closed
3/13/2012	9:26:28 AM	Main Vac valve opened
3/13/2012	9:26:28 AM	Helium MFC set to  0.000000
3/13/2012	9:26:28 AM	H2 MFC set to  0.000000
3/13/2012	9:26:28 AM	BCl3 MFC set to  0.000000
3/13/2012	9:26:28 AM	PH3 MFC set to  0.000000
3/13/2012	9:26:28 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:26:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:26:29 AM	Tube furnace set to 0
3/13/2012	9:26:59 AM	H2 valve closed
3/13/2012	9:26:59 AM	BCl3 valve closed
3/13/2012	9:26:59 AM	PH3 valve closed
3/13/2012	9:26:59 AM	SiCl4 pre valve closed
3/13/2012	9:26:59 AM	SiCl4 post valve closed
3/13/2012	9:26:59 AM	Bypass valve closed
3/13/2012	9:26:59 AM	Bubbler valve closed
3/13/2012	9:26:59 AM	Helium valve opened
3/13/2012	9:26:59 AM	Main Vac valve opened
3/13/2012	9:26:59 AM	Helium MFC set to  20.000000
3/13/2012	9:26:59 AM	H2 MFC set to  0.000000
3/13/2012	9:26:59 AM	BCl3 MFC set to  0.000000
3/13/2012	9:26:59 AM	PH3 MFC set to  0.000000
3/13/2012	9:26:59 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:26:59 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:26:59 AM	Tube furnace set to 0
3/13/2012	9:27:29 AM	Helium valve closed
3/13/2012	9:27:29 AM	H2 valve closed
3/13/2012	9:27:29 AM	BCl3 valve closed
3/13/2012	9:27:29 AM	PH3 valve closed
3/13/2012	9:27:29 AM	SiCl4 pre valve closed
3/13/2012	9:27:29 AM	SiCl4 post valve closed
3/13/2012	9:27:29 AM	Bypass valve closed
3/13/2012	9:27:29 AM	Bubbler valve closed
3/13/2012	9:27:29 AM	Main Vac valve opened
3/13/2012	9:27:29 AM	Helium MFC set to  0.000000
3/13/2012	9:27:29 AM	H2 MFC set to  0.000000
3/13/2012	9:27:29 AM	BCl3 MFC set to  0.000000
3/13/2012	9:27:29 AM	PH3 MFC set to  0.000000
3/13/2012	9:27:29 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:27:29 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:27:29 AM	Tube furnace set to 0
3/13/2012	9:27:30 AM	Run finished at 9:27 AM
3/13/2012	9:27:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	9:29:05 AM	Main Vac valve closed
3/13/2012	9:29:15 AM	Main Vac valve opened
3/13/2012	9:32:30 AM	Recipe started at 9:32 AM
3/13/2012	9:32:30 AM	Helium valve closed
3/13/2012	9:32:30 AM	H2 valve closed
3/13/2012	9:32:30 AM	BCl3 valve closed
3/13/2012	9:32:30 AM	PH3 valve closed
3/13/2012	9:32:30 AM	SiCl4 pre valve closed
3/13/2012	9:32:30 AM	SiCl4 post valve closed
3/13/2012	9:32:30 AM	Main Vac valve closed
3/13/2012	9:32:30 AM	Bypass valve closed
3/13/2012	9:32:30 AM	Bubbler valve closed
3/13/2012	9:32:30 AM	Helium MFC set to  0.000000
3/13/2012	9:32:30 AM	H2 MFC set to  0.000000
3/13/2012	9:32:30 AM	BCl3 MFC set to  0.000000
3/13/2012	9:32:30 AM	PH3 MFC set to  0.000000
3/13/2012	9:32:30 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:32:30 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:32:30 AM	Tube furnace set to 0
3/13/2012	9:32:33 AM	Helium valve closed
3/13/2012	9:32:33 AM	BCl3 valve closed
3/13/2012	9:32:33 AM	PH3 valve closed
3/13/2012	9:32:33 AM	SiCl4 pre valve closed
3/13/2012	9:32:33 AM	SiCl4 post valve closed
3/13/2012	9:32:33 AM	Main Vac valve closed
3/13/2012	9:32:33 AM	Bypass valve closed
3/13/2012	9:32:33 AM	Bubbler valve closed
3/13/2012	9:32:33 AM	H2 valve opened
3/13/2012	9:32:33 AM	Helium MFC set to  0.000000
3/13/2012	9:32:33 AM	H2 MFC set to  500.000000
3/13/2012	9:32:33 AM	BCl3 MFC set to  0.000000
3/13/2012	9:32:33 AM	PH3 MFC set to  0.000000
3/13/2012	9:32:33 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:32:33 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:32:33 AM	Tube furnace set to 0
3/13/2012	9:33:40 AM	Helium valve closed
3/13/2012	9:33:40 AM	BCl3 valve closed
3/13/2012	9:33:40 AM	PH3 valve closed
3/13/2012	9:33:40 AM	SiCl4 pre valve closed
3/13/2012	9:33:40 AM	SiCl4 post valve closed
3/13/2012	9:33:40 AM	Main Vac valve closed
3/13/2012	9:33:40 AM	Bypass valve closed
3/13/2012	9:33:40 AM	H2 valve opened
3/13/2012	9:33:40 AM	Bubbler valve opened
3/13/2012	9:33:40 AM	Helium MFC set to  0.000000
3/13/2012	9:33:40 AM	H2 MFC set to  500.000000
3/13/2012	9:33:40 AM	BCl3 MFC set to  0.000000
3/13/2012	9:33:40 AM	PH3 MFC set to  0.000000
3/13/2012	9:33:40 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:33:40 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:33:40 AM	Tube furnace set to 0
3/13/2012	9:33:41 AM	Helium valve closed
3/13/2012	9:33:41 AM	BCl3 valve closed
3/13/2012	9:33:41 AM	PH3 valve closed
3/13/2012	9:33:41 AM	SiCl4 pre valve closed
3/13/2012	9:33:41 AM	SiCl4 post valve closed
3/13/2012	9:33:41 AM	Main Vac valve closed
3/13/2012	9:33:41 AM	Bypass valve closed
3/13/2012	9:33:41 AM	H2 valve opened
3/13/2012	9:33:41 AM	Bubbler valve opened
3/13/2012	9:33:41 AM	Helium MFC set to  0.000000
3/13/2012	9:33:41 AM	H2 MFC set to  500.000000
3/13/2012	9:33:41 AM	BCl3 MFC set to  0.000000
3/13/2012	9:33:41 AM	PH3 MFC set to  0.000000
3/13/2012	9:33:41 AM	SiCl4 MFC set to  0.000000
3/13/2012	9:33:41 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:33:41 AM	Tube furnace set to 950
3/13/2012	9:53:41 AM	Helium valve closed
3/13/2012	9:53:41 AM	BCl3 valve closed
3/13/2012	9:53:41 AM	PH3 valve closed
3/13/2012	9:53:41 AM	Main Vac valve closed
3/13/2012	9:53:41 AM	Bypass valve closed
3/13/2012	9:53:41 AM	H2 valve opened
3/13/2012	9:53:41 AM	SiCl4 pre valve opened
3/13/2012	9:53:41 AM	SiCl4 post valve opened
3/13/2012	9:53:41 AM	Bubbler valve opened
3/13/2012	9:53:41 AM	Helium MFC set to  0.000000
3/13/2012	9:53:41 AM	H2 MFC set to  500.000000
3/13/2012	9:53:41 AM	BCl3 MFC set to  0.000000
3/13/2012	9:53:41 AM	PH3 MFC set to  0.000000
3/13/2012	9:53:41 AM	SiCl4 MFC set to  25.000000
3/13/2012	9:53:41 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	9:53:42 AM	Tube furnace set to 950
3/13/2012	10:13:42 AM	Helium valve closed
3/13/2012	10:13:42 AM	BCl3 valve closed
3/13/2012	10:13:42 AM	PH3 valve closed
3/13/2012	10:13:42 AM	SiCl4 pre valve closed
3/13/2012	10:13:42 AM	SiCl4 post valve closed
3/13/2012	10:13:42 AM	Main Vac valve closed
3/13/2012	10:13:42 AM	Bypass valve closed
3/13/2012	10:13:42 AM	H2 valve opened
3/13/2012	10:13:42 AM	Bubbler valve opened
3/13/2012	10:13:42 AM	Helium MFC set to  0.000000
3/13/2012	10:13:42 AM	H2 MFC set to  500.000000
3/13/2012	10:13:42 AM	BCl3 MFC set to  0.000000
3/13/2012	10:13:42 AM	PH3 MFC set to  0.000000
3/13/2012	10:13:42 AM	SiCl4 MFC set to  0.000000
3/13/2012	10:13:42 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	10:13:42 AM	Tube furnace set to 750
3/13/2012	10:18:42 AM	H2 valve closed
3/13/2012	10:18:42 AM	BCl3 valve closed
3/13/2012	10:18:42 AM	PH3 valve closed
3/13/2012	10:18:42 AM	SiCl4 pre valve closed
3/13/2012	10:18:42 AM	SiCl4 post valve closed
3/13/2012	10:18:42 AM	Main Vac valve closed
3/13/2012	10:18:42 AM	Bypass valve closed
3/13/2012	10:18:42 AM	Helium valve opened
3/13/2012	10:18:42 AM	Bubbler valve opened
3/13/2012	10:18:42 AM	Helium MFC set to  500.000000
3/13/2012	10:18:42 AM	H2 MFC set to  0.000000
3/13/2012	10:18:42 AM	BCl3 MFC set to  0.000000
3/13/2012	10:18:42 AM	PH3 MFC set to  0.000000
3/13/2012	10:18:42 AM	SiCl4 MFC set to  0.000000
3/13/2012	10:18:42 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	10:18:42 AM	Tube furnace set to 0
3/13/2012	10:38:42 AM	Helium valve closed
3/13/2012	10:38:42 AM	H2 valve closed
3/13/2012	10:38:42 AM	BCl3 valve closed
3/13/2012	10:38:42 AM	PH3 valve closed
3/13/2012	10:38:42 AM	SiCl4 pre valve closed
3/13/2012	10:38:42 AM	SiCl4 post valve closed
3/13/2012	10:38:42 AM	Main Vac valve closed
3/13/2012	10:38:42 AM	Bypass valve closed
3/13/2012	10:38:42 AM	Bubbler valve closed
3/13/2012	10:38:42 AM	Helium MFC set to  0.000000
3/13/2012	10:38:42 AM	H2 MFC set to  0.000000
3/13/2012	10:38:42 AM	BCl3 MFC set to  0.000000
3/13/2012	10:38:42 AM	PH3 MFC set to  0.000000
3/13/2012	10:38:42 AM	SiCl4 MFC set to  0.000000
3/13/2012	10:38:42 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	10:38:42 AM	Tube furnace set to 0
3/13/2012	10:38:43 AM	Run finished at 10:38 AM
3/13/2012	11:19:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	11:19:01 AM	Recipe started at 11:19 AM
3/13/2012	11:19:01 AM	Helium valve closed
3/13/2012	11:19:01 AM	H2 valve closed
3/13/2012	11:19:01 AM	BCl3 valve closed
3/13/2012	11:19:01 AM	PH3 valve closed
3/13/2012	11:19:01 AM	SiCl4 pre valve closed
3/13/2012	11:19:01 AM	SiCl4 post valve closed
3/13/2012	11:19:01 AM	Main Vac valve closed
3/13/2012	11:19:01 AM	Bypass valve closed
3/13/2012	11:19:01 AM	Bubbler valve closed
3/13/2012	11:19:01 AM	Helium MFC set to  0.000000
3/13/2012	11:19:01 AM	H2 MFC set to  0.000000
3/13/2012	11:19:01 AM	BCl3 MFC set to  0.000000
3/13/2012	11:19:01 AM	PH3 MFC set to  0.000000
3/13/2012	11:19:01 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:19:01 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:19:01 AM	Tube furnace set to 0
3/13/2012	11:19:04 AM	H2 valve closed
3/13/2012	11:19:04 AM	BCl3 valve closed
3/13/2012	11:19:04 AM	PH3 valve closed
3/13/2012	11:19:04 AM	SiCl4 pre valve closed
3/13/2012	11:19:04 AM	SiCl4 post valve closed
3/13/2012	11:19:04 AM	Main Vac valve closed
3/13/2012	11:19:04 AM	Bypass valve closed
3/13/2012	11:19:04 AM	Bubbler valve closed
3/13/2012	11:19:04 AM	Helium valve opened
3/13/2012	11:19:04 AM	Helium MFC set to  500.000000
3/13/2012	11:19:04 AM	H2 MFC set to  0.000000
3/13/2012	11:19:04 AM	BCl3 MFC set to  0.000000
3/13/2012	11:19:04 AM	PH3 MFC set to  0.000000
3/13/2012	11:19:04 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:19:04 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:19:04 AM	Tube furnace set to 0
3/13/2012	11:19:06 AM	Helium valve closed
3/13/2012	11:19:06 AM	H2 valve closed
3/13/2012	11:19:06 AM	BCl3 valve closed
3/13/2012	11:19:06 AM	PH3 valve closed
3/13/2012	11:19:06 AM	SiCl4 pre valve closed
3/13/2012	11:19:06 AM	SiCl4 post valve closed
3/13/2012	11:19:06 AM	Main Vac valve closed
3/13/2012	11:19:06 AM	Bypass valve closed
3/13/2012	11:19:06 AM	Bubbler valve closed
3/13/2012	11:19:06 AM	Helium MFC set to  0.000000
3/13/2012	11:19:06 AM	H2 MFC set to  0.000000
3/13/2012	11:19:06 AM	BCl3 MFC set to  0.000000
3/13/2012	11:19:06 AM	PH3 MFC set to  0.000000
3/13/2012	11:19:06 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:19:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:19:07 AM	Tube furnace set to 0
3/13/2012	11:19:08 AM	Run finished at 11:19 AM
3/13/2012	11:19:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	11:25:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	11:25:39 AM	Recipe started at 11:25 AM
3/13/2012	11:25:40 AM	Helium valve closed
3/13/2012	11:25:40 AM	H2 valve closed
3/13/2012	11:25:40 AM	BCl3 valve closed
3/13/2012	11:25:40 AM	PH3 valve closed
3/13/2012	11:25:40 AM	SiCl4 pre valve closed
3/13/2012	11:25:40 AM	SiCl4 post valve closed
3/13/2012	11:25:40 AM	Main Vac valve closed
3/13/2012	11:25:40 AM	Bubbler valve closed
3/13/2012	11:25:40 AM	Bypass valve opened
3/13/2012	11:25:40 AM	Helium MFC set to  0.000000
3/13/2012	11:25:40 AM	H2 MFC set to  0.000000
3/13/2012	11:25:40 AM	BCl3 MFC set to  0.000000
3/13/2012	11:25:40 AM	PH3 MFC set to  0.000000
3/13/2012	11:25:40 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:25:40 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:25:40 AM	Tube furnace set to 0
3/13/2012	11:26:43 AM	Helium valve closed
3/13/2012	11:26:43 AM	H2 valve closed
3/13/2012	11:26:43 AM	BCl3 valve closed
3/13/2012	11:26:43 AM	PH3 valve closed
3/13/2012	11:26:43 AM	SiCl4 pre valve closed
3/13/2012	11:26:43 AM	SiCl4 post valve closed
3/13/2012	11:26:43 AM	Main Vac valve closed
3/13/2012	11:26:43 AM	Bubbler valve closed
3/13/2012	11:26:43 AM	Bypass valve opened
3/13/2012	11:26:43 AM	Helium MFC set to  0.000000
3/13/2012	11:26:43 AM	H2 MFC set to  0.000000
3/13/2012	11:26:43 AM	BCl3 MFC set to  0.000000
3/13/2012	11:26:43 AM	PH3 MFC set to  0.000000
3/13/2012	11:26:43 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:26:43 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:26:43 AM	Tube furnace set to 0
3/13/2012	11:27:43 AM	Helium valve closed
3/13/2012	11:27:43 AM	H2 valve closed
3/13/2012	11:27:43 AM	BCl3 valve closed
3/13/2012	11:27:43 AM	PH3 valve closed
3/13/2012	11:27:43 AM	SiCl4 pre valve closed
3/13/2012	11:27:43 AM	SiCl4 post valve closed
3/13/2012	11:27:43 AM	Bypass valve closed
3/13/2012	11:27:43 AM	Bubbler valve closed
3/13/2012	11:27:43 AM	Main Vac valve opened
3/13/2012	11:27:43 AM	Helium MFC set to  0.000000
3/13/2012	11:27:43 AM	H2 MFC set to  0.000000
3/13/2012	11:27:43 AM	BCl3 MFC set to  0.000000
3/13/2012	11:27:43 AM	PH3 MFC set to  0.000000
3/13/2012	11:27:43 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:27:43 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:27:44 AM	Tube furnace set to 0
3/13/2012	11:27:45 AM	Run finished at 11:27 AM
3/13/2012	11:27:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	11:43:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	11:43:47 AM	Recipe started at 11:43 AM
3/13/2012	11:43:47 AM	Helium valve closed
3/13/2012	11:43:47 AM	H2 valve closed
3/13/2012	11:43:47 AM	BCl3 valve closed
3/13/2012	11:43:47 AM	PH3 valve closed
3/13/2012	11:43:47 AM	SiCl4 pre valve closed
3/13/2012	11:43:47 AM	SiCl4 post valve closed
3/13/2012	11:43:47 AM	Main Vac valve closed
3/13/2012	11:43:47 AM	Bubbler valve closed
3/13/2012	11:43:47 AM	Bypass valve opened
3/13/2012	11:43:47 AM	Helium MFC set to  0.000000
3/13/2012	11:43:47 AM	H2 MFC set to  0.000000
3/13/2012	11:43:47 AM	BCl3 MFC set to  0.000000
3/13/2012	11:43:47 AM	PH3 MFC set to  0.000000
3/13/2012	11:43:47 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:43:47 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:43:47 AM	Tube furnace set to 0
3/13/2012	11:43:47 AM	Helium valve closed
3/13/2012	11:43:47 AM	H2 valve closed
3/13/2012	11:43:47 AM	BCl3 valve closed
3/13/2012	11:43:47 AM	PH3 valve closed
3/13/2012	11:43:47 AM	SiCl4 pre valve closed
3/13/2012	11:43:47 AM	SiCl4 post valve closed
3/13/2012	11:43:47 AM	Main Vac valve closed
3/13/2012	11:43:47 AM	Bubbler valve closed
3/13/2012	11:43:47 AM	Bypass valve opened
3/13/2012	11:43:47 AM	Helium MFC set to  0.000000
3/13/2012	11:43:47 AM	H2 MFC set to  0.000000
3/13/2012	11:43:47 AM	BCl3 MFC set to  0.000000
3/13/2012	11:43:47 AM	PH3 MFC set to  0.000000
3/13/2012	11:43:47 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:43:47 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:43:48 AM	Tube furnace set to 0
3/13/2012	11:44:00 AM	Helium valve closed
3/13/2012	11:44:00 AM	H2 valve closed
3/13/2012	11:44:00 AM	BCl3 valve closed
3/13/2012	11:44:00 AM	PH3 valve closed
3/13/2012	11:44:00 AM	SiCl4 pre valve closed
3/13/2012	11:44:00 AM	SiCl4 post valve closed
3/13/2012	11:44:00 AM	Bypass valve closed
3/13/2012	11:44:00 AM	Bubbler valve closed
3/13/2012	11:44:00 AM	Main Vac valve opened
3/13/2012	11:44:00 AM	Helium MFC set to  0.000000
3/13/2012	11:44:00 AM	H2 MFC set to  0.000000
3/13/2012	11:44:00 AM	BCl3 MFC set to  0.000000
3/13/2012	11:44:00 AM	PH3 MFC set to  0.000000
3/13/2012	11:44:00 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:44:00 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:44:00 AM	Tube furnace set to 0
3/13/2012	11:44:03 AM	H2 valve closed
3/13/2012	11:44:04 AM	BCl3 valve closed
3/13/2012	11:44:04 AM	PH3 valve closed
3/13/2012	11:44:04 AM	SiCl4 pre valve closed
3/13/2012	11:44:04 AM	SiCl4 post valve closed
3/13/2012	11:44:04 AM	Bypass valve closed
3/13/2012	11:44:04 AM	Bubbler valve closed
3/13/2012	11:44:04 AM	Helium valve opened
3/13/2012	11:44:04 AM	Main Vac valve opened
3/13/2012	11:44:04 AM	Helium MFC set to  20.000000
3/13/2012	11:44:04 AM	H2 MFC set to  0.000000
3/13/2012	11:44:04 AM	BCl3 MFC set to  0.000000
3/13/2012	11:44:04 AM	PH3 MFC set to  0.000000
3/13/2012	11:44:04 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:44:04 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:44:04 AM	Tube furnace set to 0
3/13/2012	11:44:34 AM	Helium valve closed
3/13/2012	11:44:34 AM	H2 valve closed
3/13/2012	11:44:34 AM	BCl3 valve closed
3/13/2012	11:44:34 AM	PH3 valve closed
3/13/2012	11:44:34 AM	SiCl4 pre valve closed
3/13/2012	11:44:34 AM	SiCl4 post valve closed
3/13/2012	11:44:34 AM	Bypass valve closed
3/13/2012	11:44:34 AM	Bubbler valve closed
3/13/2012	11:44:34 AM	Main Vac valve opened
3/13/2012	11:44:34 AM	Helium MFC set to  0.000000
3/13/2012	11:44:34 AM	H2 MFC set to  0.000000
3/13/2012	11:44:34 AM	BCl3 MFC set to  0.000000
3/13/2012	11:44:34 AM	PH3 MFC set to  0.000000
3/13/2012	11:44:34 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:44:34 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:44:34 AM	Tube furnace set to 0
3/13/2012	11:45:04 AM	H2 valve closed
3/13/2012	11:45:04 AM	BCl3 valve closed
3/13/2012	11:45:04 AM	PH3 valve closed
3/13/2012	11:45:04 AM	SiCl4 pre valve closed
3/13/2012	11:45:04 AM	SiCl4 post valve closed
3/13/2012	11:45:04 AM	Bypass valve closed
3/13/2012	11:45:04 AM	Bubbler valve closed
3/13/2012	11:45:04 AM	Helium valve opened
3/13/2012	11:45:04 AM	Main Vac valve opened
3/13/2012	11:45:04 AM	Helium MFC set to  20.000000
3/13/2012	11:45:04 AM	H2 MFC set to  0.000000
3/13/2012	11:45:04 AM	BCl3 MFC set to  0.000000
3/13/2012	11:45:04 AM	PH3 MFC set to  0.000000
3/13/2012	11:45:04 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:45:04 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:45:04 AM	Tube furnace set to 0
3/13/2012	11:45:34 AM	Helium valve closed
3/13/2012	11:45:34 AM	H2 valve closed
3/13/2012	11:45:34 AM	BCl3 valve closed
3/13/2012	11:45:34 AM	PH3 valve closed
3/13/2012	11:45:34 AM	SiCl4 pre valve closed
3/13/2012	11:45:34 AM	SiCl4 post valve closed
3/13/2012	11:45:34 AM	Bypass valve closed
3/13/2012	11:45:34 AM	Bubbler valve closed
3/13/2012	11:45:34 AM	Main Vac valve opened
3/13/2012	11:45:34 AM	Helium MFC set to  0.000000
3/13/2012	11:45:34 AM	H2 MFC set to  0.000000
3/13/2012	11:45:34 AM	BCl3 MFC set to  0.000000
3/13/2012	11:45:34 AM	PH3 MFC set to  0.000000
3/13/2012	11:45:34 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:45:34 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:45:34 AM	Tube furnace set to 0
3/13/2012	11:46:04 AM	H2 valve closed
3/13/2012	11:46:04 AM	BCl3 valve closed
3/13/2012	11:46:04 AM	PH3 valve closed
3/13/2012	11:46:04 AM	SiCl4 pre valve closed
3/13/2012	11:46:04 AM	SiCl4 post valve closed
3/13/2012	11:46:04 AM	Bypass valve closed
3/13/2012	11:46:04 AM	Bubbler valve closed
3/13/2012	11:46:04 AM	Helium valve opened
3/13/2012	11:46:04 AM	Main Vac valve opened
3/13/2012	11:46:04 AM	Helium MFC set to  20.000000
3/13/2012	11:46:04 AM	H2 MFC set to  0.000000
3/13/2012	11:46:04 AM	BCl3 MFC set to  0.000000
3/13/2012	11:46:04 AM	PH3 MFC set to  0.000000
3/13/2012	11:46:04 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:46:04 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:46:05 AM	Tube furnace set to 0
3/13/2012	11:46:35 AM	Helium valve closed
3/13/2012	11:46:35 AM	H2 valve closed
3/13/2012	11:46:35 AM	BCl3 valve closed
3/13/2012	11:46:35 AM	PH3 valve closed
3/13/2012	11:46:35 AM	SiCl4 pre valve closed
3/13/2012	11:46:35 AM	SiCl4 post valve closed
3/13/2012	11:46:35 AM	Bypass valve closed
3/13/2012	11:46:35 AM	Bubbler valve closed
3/13/2012	11:46:35 AM	Main Vac valve opened
3/13/2012	11:46:35 AM	Helium MFC set to  0.000000
3/13/2012	11:46:35 AM	H2 MFC set to  0.000000
3/13/2012	11:46:35 AM	BCl3 MFC set to  0.000000
3/13/2012	11:46:35 AM	PH3 MFC set to  0.000000
3/13/2012	11:46:35 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:46:35 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:46:35 AM	Tube furnace set to 0
3/13/2012	11:47:05 AM	H2 valve closed
3/13/2012	11:47:05 AM	BCl3 valve closed
3/13/2012	11:47:05 AM	PH3 valve closed
3/13/2012	11:47:05 AM	SiCl4 pre valve closed
3/13/2012	11:47:05 AM	SiCl4 post valve closed
3/13/2012	11:47:05 AM	Bypass valve closed
3/13/2012	11:47:05 AM	Bubbler valve closed
3/13/2012	11:47:05 AM	Helium valve opened
3/13/2012	11:47:05 AM	Main Vac valve opened
3/13/2012	11:47:05 AM	Helium MFC set to  20.000000
3/13/2012	11:47:05 AM	H2 MFC set to  0.000000
3/13/2012	11:47:05 AM	BCl3 MFC set to  0.000000
3/13/2012	11:47:05 AM	PH3 MFC set to  0.000000
3/13/2012	11:47:05 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:47:05 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:47:05 AM	Tube furnace set to 0
3/13/2012	11:47:35 AM	Helium valve closed
3/13/2012	11:47:35 AM	H2 valve closed
3/13/2012	11:47:35 AM	BCl3 valve closed
3/13/2012	11:47:35 AM	PH3 valve closed
3/13/2012	11:47:35 AM	SiCl4 pre valve closed
3/13/2012	11:47:35 AM	SiCl4 post valve closed
3/13/2012	11:47:35 AM	Bypass valve closed
3/13/2012	11:47:35 AM	Bubbler valve closed
3/13/2012	11:47:35 AM	Main Vac valve opened
3/13/2012	11:47:35 AM	Helium MFC set to  0.000000
3/13/2012	11:47:35 AM	H2 MFC set to  0.000000
3/13/2012	11:47:35 AM	BCl3 MFC set to  0.000000
3/13/2012	11:47:35 AM	PH3 MFC set to  0.000000
3/13/2012	11:47:35 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:47:35 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:47:35 AM	Tube furnace set to 0
3/13/2012	11:48:05 AM	H2 valve closed
3/13/2012	11:48:05 AM	BCl3 valve closed
3/13/2012	11:48:05 AM	PH3 valve closed
3/13/2012	11:48:05 AM	SiCl4 pre valve closed
3/13/2012	11:48:05 AM	SiCl4 post valve closed
3/13/2012	11:48:05 AM	Bypass valve closed
3/13/2012	11:48:05 AM	Bubbler valve closed
3/13/2012	11:48:05 AM	Helium valve opened
3/13/2012	11:48:05 AM	Main Vac valve opened
3/13/2012	11:48:05 AM	Helium MFC set to  20.000000
3/13/2012	11:48:05 AM	H2 MFC set to  0.000000
3/13/2012	11:48:05 AM	BCl3 MFC set to  0.000000
3/13/2012	11:48:05 AM	PH3 MFC set to  0.000000
3/13/2012	11:48:05 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:48:05 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:48:05 AM	Tube furnace set to 0
3/13/2012	11:48:35 AM	Helium valve closed
3/13/2012	11:48:35 AM	H2 valve closed
3/13/2012	11:48:35 AM	BCl3 valve closed
3/13/2012	11:48:35 AM	PH3 valve closed
3/13/2012	11:48:35 AM	SiCl4 pre valve closed
3/13/2012	11:48:35 AM	SiCl4 post valve closed
3/13/2012	11:48:35 AM	Bypass valve closed
3/13/2012	11:48:35 AM	Bubbler valve closed
3/13/2012	11:48:35 AM	Main Vac valve opened
3/13/2012	11:48:35 AM	Helium MFC set to  0.000000
3/13/2012	11:48:35 AM	H2 MFC set to  0.000000
3/13/2012	11:48:35 AM	BCl3 MFC set to  0.000000
3/13/2012	11:48:35 AM	PH3 MFC set to  0.000000
3/13/2012	11:48:35 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:48:35 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:48:36 AM	Tube furnace set to 0
3/13/2012	11:49:06 AM	H2 valve closed
3/13/2012	11:49:06 AM	BCl3 valve closed
3/13/2012	11:49:06 AM	PH3 valve closed
3/13/2012	11:49:06 AM	SiCl4 pre valve closed
3/13/2012	11:49:06 AM	SiCl4 post valve closed
3/13/2012	11:49:06 AM	Bypass valve closed
3/13/2012	11:49:06 AM	Bubbler valve closed
3/13/2012	11:49:06 AM	Helium valve opened
3/13/2012	11:49:06 AM	Main Vac valve opened
3/13/2012	11:49:06 AM	Helium MFC set to  20.000000
3/13/2012	11:49:06 AM	H2 MFC set to  0.000000
3/13/2012	11:49:06 AM	BCl3 MFC set to  0.000000
3/13/2012	11:49:06 AM	PH3 MFC set to  0.000000
3/13/2012	11:49:06 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:49:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:49:06 AM	Tube furnace set to 0
3/13/2012	11:49:36 AM	Helium valve closed
3/13/2012	11:49:36 AM	H2 valve closed
3/13/2012	11:49:36 AM	BCl3 valve closed
3/13/2012	11:49:36 AM	PH3 valve closed
3/13/2012	11:49:36 AM	SiCl4 pre valve closed
3/13/2012	11:49:36 AM	SiCl4 post valve closed
3/13/2012	11:49:36 AM	Bypass valve closed
3/13/2012	11:49:36 AM	Bubbler valve closed
3/13/2012	11:49:36 AM	Main Vac valve opened
3/13/2012	11:49:36 AM	Helium MFC set to  0.000000
3/13/2012	11:49:36 AM	H2 MFC set to  0.000000
3/13/2012	11:49:36 AM	BCl3 MFC set to  0.000000
3/13/2012	11:49:36 AM	PH3 MFC set to  0.000000
3/13/2012	11:49:36 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:49:36 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:49:36 AM	Tube furnace set to 0
3/13/2012	11:50:06 AM	H2 valve closed
3/13/2012	11:50:06 AM	BCl3 valve closed
3/13/2012	11:50:06 AM	PH3 valve closed
3/13/2012	11:50:06 AM	SiCl4 pre valve closed
3/13/2012	11:50:06 AM	SiCl4 post valve closed
3/13/2012	11:50:06 AM	Bypass valve closed
3/13/2012	11:50:06 AM	Bubbler valve closed
3/13/2012	11:50:06 AM	Helium valve opened
3/13/2012	11:50:06 AM	Main Vac valve opened
3/13/2012	11:50:06 AM	Helium MFC set to  20.000000
3/13/2012	11:50:06 AM	H2 MFC set to  0.000000
3/13/2012	11:50:06 AM	BCl3 MFC set to  0.000000
3/13/2012	11:50:06 AM	PH3 MFC set to  0.000000
3/13/2012	11:50:06 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:50:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:50:06 AM	Tube furnace set to 0
3/13/2012	11:50:36 AM	Helium valve closed
3/13/2012	11:50:36 AM	H2 valve closed
3/13/2012	11:50:36 AM	BCl3 valve closed
3/13/2012	11:50:36 AM	PH3 valve closed
3/13/2012	11:50:36 AM	SiCl4 pre valve closed
3/13/2012	11:50:36 AM	SiCl4 post valve closed
3/13/2012	11:50:36 AM	Bypass valve closed
3/13/2012	11:50:36 AM	Bubbler valve closed
3/13/2012	11:50:36 AM	Main Vac valve opened
3/13/2012	11:50:36 AM	Helium MFC set to  0.000000
3/13/2012	11:50:36 AM	H2 MFC set to  0.000000
3/13/2012	11:50:36 AM	BCl3 MFC set to  0.000000
3/13/2012	11:50:36 AM	PH3 MFC set to  0.000000
3/13/2012	11:50:36 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:50:36 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:50:36 AM	Tube furnace set to 0
3/13/2012	11:51:06 AM	H2 valve closed
3/13/2012	11:51:06 AM	BCl3 valve closed
3/13/2012	11:51:06 AM	PH3 valve closed
3/13/2012	11:51:06 AM	SiCl4 pre valve closed
3/13/2012	11:51:06 AM	SiCl4 post valve closed
3/13/2012	11:51:06 AM	Bypass valve closed
3/13/2012	11:51:06 AM	Bubbler valve closed
3/13/2012	11:51:06 AM	Helium valve opened
3/13/2012	11:51:06 AM	Main Vac valve opened
3/13/2012	11:51:06 AM	Helium MFC set to  20.000000
3/13/2012	11:51:06 AM	H2 MFC set to  0.000000
3/13/2012	11:51:06 AM	BCl3 MFC set to  0.000000
3/13/2012	11:51:06 AM	PH3 MFC set to  0.000000
3/13/2012	11:51:06 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:51:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:51:07 AM	Tube furnace set to 0
3/13/2012	11:51:37 AM	Helium valve closed
3/13/2012	11:51:37 AM	H2 valve closed
3/13/2012	11:51:37 AM	BCl3 valve closed
3/13/2012	11:51:37 AM	PH3 valve closed
3/13/2012	11:51:37 AM	SiCl4 pre valve closed
3/13/2012	11:51:37 AM	SiCl4 post valve closed
3/13/2012	11:51:37 AM	Bypass valve closed
3/13/2012	11:51:37 AM	Bubbler valve closed
3/13/2012	11:51:37 AM	Main Vac valve opened
3/13/2012	11:51:37 AM	Helium MFC set to  0.000000
3/13/2012	11:51:37 AM	H2 MFC set to  0.000000
3/13/2012	11:51:37 AM	BCl3 MFC set to  0.000000
3/13/2012	11:51:37 AM	PH3 MFC set to  0.000000
3/13/2012	11:51:37 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:51:37 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:51:37 AM	Tube furnace set to 0
3/13/2012	11:52:07 AM	H2 valve closed
3/13/2012	11:52:07 AM	BCl3 valve closed
3/13/2012	11:52:07 AM	PH3 valve closed
3/13/2012	11:52:07 AM	SiCl4 pre valve closed
3/13/2012	11:52:07 AM	SiCl4 post valve closed
3/13/2012	11:52:07 AM	Bypass valve closed
3/13/2012	11:52:07 AM	Bubbler valve closed
3/13/2012	11:52:07 AM	Helium valve opened
3/13/2012	11:52:07 AM	Main Vac valve opened
3/13/2012	11:52:07 AM	Helium MFC set to  20.000000
3/13/2012	11:52:07 AM	H2 MFC set to  0.000000
3/13/2012	11:52:07 AM	BCl3 MFC set to  0.000000
3/13/2012	11:52:07 AM	PH3 MFC set to  0.000000
3/13/2012	11:52:07 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:52:07 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:52:07 AM	Tube furnace set to 0
3/13/2012	11:52:37 AM	Helium valve closed
3/13/2012	11:52:37 AM	H2 valve closed
3/13/2012	11:52:37 AM	BCl3 valve closed
3/13/2012	11:52:37 AM	PH3 valve closed
3/13/2012	11:52:37 AM	SiCl4 pre valve closed
3/13/2012	11:52:37 AM	SiCl4 post valve closed
3/13/2012	11:52:37 AM	Bypass valve closed
3/13/2012	11:52:37 AM	Bubbler valve closed
3/13/2012	11:52:37 AM	Main Vac valve opened
3/13/2012	11:52:37 AM	Helium MFC set to  0.000000
3/13/2012	11:52:37 AM	H2 MFC set to  0.000000
3/13/2012	11:52:37 AM	BCl3 MFC set to  0.000000
3/13/2012	11:52:37 AM	PH3 MFC set to  0.000000
3/13/2012	11:52:37 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:52:37 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:52:37 AM	Tube furnace set to 0
3/13/2012	11:53:07 AM	H2 valve closed
3/13/2012	11:53:07 AM	BCl3 valve closed
3/13/2012	11:53:07 AM	PH3 valve closed
3/13/2012	11:53:07 AM	SiCl4 pre valve closed
3/13/2012	11:53:07 AM	SiCl4 post valve closed
3/13/2012	11:53:07 AM	Bypass valve closed
3/13/2012	11:53:07 AM	Bubbler valve closed
3/13/2012	11:53:07 AM	Helium valve opened
3/13/2012	11:53:07 AM	Main Vac valve opened
3/13/2012	11:53:07 AM	Helium MFC set to  20.000000
3/13/2012	11:53:07 AM	H2 MFC set to  0.000000
3/13/2012	11:53:07 AM	BCl3 MFC set to  0.000000
3/13/2012	11:53:07 AM	PH3 MFC set to  0.000000
3/13/2012	11:53:07 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:53:07 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:53:07 AM	Tube furnace set to 0
3/13/2012	11:53:37 AM	Helium valve closed
3/13/2012	11:53:37 AM	H2 valve closed
3/13/2012	11:53:37 AM	BCl3 valve closed
3/13/2012	11:53:37 AM	PH3 valve closed
3/13/2012	11:53:37 AM	SiCl4 pre valve closed
3/13/2012	11:53:37 AM	SiCl4 post valve closed
3/13/2012	11:53:37 AM	Bypass valve closed
3/13/2012	11:53:37 AM	Bubbler valve closed
3/13/2012	11:53:37 AM	Main Vac valve opened
3/13/2012	11:53:37 AM	Helium MFC set to  0.000000
3/13/2012	11:53:38 AM	H2 MFC set to  0.000000
3/13/2012	11:53:38 AM	BCl3 MFC set to  0.000000
3/13/2012	11:53:38 AM	PH3 MFC set to  0.000000
3/13/2012	11:53:38 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:53:38 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:53:38 AM	Tube furnace set to 0
3/13/2012	11:53:39 AM	Run finished at 11:53 AM
3/13/2012	11:53:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	11:56:37 AM	Main Vac valve closed
3/13/2012	11:57:47 AM	Recipe started at 11:57 AM
3/13/2012	11:57:47 AM	Helium valve closed
3/13/2012	11:57:47 AM	H2 valve closed
3/13/2012	11:57:47 AM	BCl3 valve closed
3/13/2012	11:57:47 AM	PH3 valve closed
3/13/2012	11:57:47 AM	SiCl4 pre valve closed
3/13/2012	11:57:47 AM	SiCl4 post valve closed
3/13/2012	11:57:47 AM	Main Vac valve closed
3/13/2012	11:57:47 AM	Bypass valve closed
3/13/2012	11:57:47 AM	Bubbler valve closed
3/13/2012	11:57:47 AM	Helium MFC set to  0.000000
3/13/2012	11:57:47 AM	H2 MFC set to  0.000000
3/13/2012	11:57:47 AM	BCl3 MFC set to  0.000000
3/13/2012	11:57:47 AM	PH3 MFC set to  0.000000
3/13/2012	11:57:47 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:57:47 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:57:47 AM	Tube furnace set to 0
3/13/2012	11:57:50 AM	Helium valve closed
3/13/2012	11:57:50 AM	BCl3 valve closed
3/13/2012	11:57:50 AM	PH3 valve closed
3/13/2012	11:57:50 AM	SiCl4 pre valve closed
3/13/2012	11:57:50 AM	SiCl4 post valve closed
3/13/2012	11:57:50 AM	Main Vac valve closed
3/13/2012	11:57:50 AM	Bypass valve closed
3/13/2012	11:57:50 AM	Bubbler valve closed
3/13/2012	11:57:50 AM	H2 valve opened
3/13/2012	11:57:50 AM	Helium MFC set to  0.000000
3/13/2012	11:57:50 AM	H2 MFC set to  500.000000
3/13/2012	11:57:50 AM	BCl3 MFC set to  0.000000
3/13/2012	11:57:50 AM	PH3 MFC set to  0.000000
3/13/2012	11:57:50 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:57:50 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:57:50 AM	Tube furnace set to 0
3/13/2012	11:58:58 AM	Helium valve closed
3/13/2012	11:58:58 AM	BCl3 valve closed
3/13/2012	11:58:58 AM	PH3 valve closed
3/13/2012	11:58:58 AM	SiCl4 pre valve closed
3/13/2012	11:58:58 AM	SiCl4 post valve closed
3/13/2012	11:58:58 AM	Main Vac valve closed
3/13/2012	11:58:58 AM	Bypass valve closed
3/13/2012	11:58:58 AM	H2 valve opened
3/13/2012	11:58:58 AM	Bubbler valve opened
3/13/2012	11:58:58 AM	Helium MFC set to  0.000000
3/13/2012	11:58:58 AM	H2 MFC set to  500.000000
3/13/2012	11:58:58 AM	BCl3 MFC set to  0.000000
3/13/2012	11:58:58 AM	PH3 MFC set to  0.000000
3/13/2012	11:58:58 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:58:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:58:58 AM	Tube furnace set to 0
3/13/2012	11:58:59 AM	Helium valve closed
3/13/2012	11:58:59 AM	BCl3 valve closed
3/13/2012	11:58:59 AM	PH3 valve closed
3/13/2012	11:58:59 AM	SiCl4 pre valve closed
3/13/2012	11:58:59 AM	SiCl4 post valve closed
3/13/2012	11:58:59 AM	Main Vac valve closed
3/13/2012	11:58:59 AM	Bypass valve closed
3/13/2012	11:58:59 AM	H2 valve opened
3/13/2012	11:58:59 AM	Bubbler valve opened
3/13/2012	11:58:59 AM	Helium MFC set to  0.000000
3/13/2012	11:58:59 AM	H2 MFC set to  500.000000
3/13/2012	11:58:59 AM	BCl3 MFC set to  0.000000
3/13/2012	11:58:59 AM	PH3 MFC set to  0.000000
3/13/2012	11:58:59 AM	SiCl4 MFC set to  0.000000
3/13/2012	11:58:59 AM	Bypass solenoid MFC set to  0.000000
3/13/2012	11:58:59 AM	Tube furnace set to 950
3/13/2012	12:18:59 PM	Helium valve closed
3/13/2012	12:18:59 PM	BCl3 valve closed
3/13/2012	12:18:59 PM	PH3 valve closed
3/13/2012	12:18:59 PM	Main Vac valve closed
3/13/2012	12:18:59 PM	Bypass valve closed
3/13/2012	12:18:59 PM	H2 valve opened
3/13/2012	12:18:59 PM	SiCl4 pre valve opened
3/13/2012	12:18:59 PM	SiCl4 post valve opened
3/13/2012	12:18:59 PM	Bubbler valve opened
3/13/2012	12:18:59 PM	Helium MFC set to  0.000000
3/13/2012	12:18:59 PM	H2 MFC set to  500.000000
3/13/2012	12:18:59 PM	BCl3 MFC set to  0.000000
3/13/2012	12:18:59 PM	PH3 MFC set to  0.000000
3/13/2012	12:18:59 PM	SiCl4 MFC set to  25.000000
3/13/2012	12:18:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	12:18:59 PM	Tube furnace set to 950
3/13/2012	12:40:59 PM	Helium valve closed
3/13/2012	12:41:00 PM	BCl3 valve closed
3/13/2012	12:41:00 PM	PH3 valve closed
3/13/2012	12:41:00 PM	SiCl4 pre valve closed
3/13/2012	12:41:00 PM	SiCl4 post valve closed
3/13/2012	12:41:00 PM	Main Vac valve closed
3/13/2012	12:41:00 PM	Bypass valve closed
3/13/2012	12:41:00 PM	H2 valve opened
3/13/2012	12:41:00 PM	Bubbler valve opened
3/13/2012	12:41:00 PM	Helium MFC set to  0.000000
3/13/2012	12:41:00 PM	H2 MFC set to  500.000000
3/13/2012	12:41:00 PM	BCl3 MFC set to  0.000000
3/13/2012	12:41:00 PM	PH3 MFC set to  0.000000
3/13/2012	12:41:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	12:41:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	12:41:00 PM	Tube furnace set to 750
3/13/2012	12:46:00 PM	H2 valve closed
3/13/2012	12:46:00 PM	BCl3 valve closed
3/13/2012	12:46:00 PM	PH3 valve closed
3/13/2012	12:46:00 PM	SiCl4 pre valve closed
3/13/2012	12:46:00 PM	SiCl4 post valve closed
3/13/2012	12:46:00 PM	Main Vac valve closed
3/13/2012	12:46:00 PM	Bypass valve closed
3/13/2012	12:46:00 PM	Helium valve opened
3/13/2012	12:46:00 PM	Bubbler valve opened
3/13/2012	12:46:00 PM	Helium MFC set to  500.000000
3/13/2012	12:46:00 PM	H2 MFC set to  0.000000
3/13/2012	12:46:00 PM	BCl3 MFC set to  0.000000
3/13/2012	12:46:00 PM	PH3 MFC set to  0.000000
3/13/2012	12:46:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	12:46:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	12:46:00 PM	Tube furnace set to 0
3/13/2012	1:06:00 PM	Helium valve closed
3/13/2012	1:06:00 PM	H2 valve closed
3/13/2012	1:06:00 PM	BCl3 valve closed
3/13/2012	1:06:00 PM	PH3 valve closed
3/13/2012	1:06:00 PM	SiCl4 pre valve closed
3/13/2012	1:06:00 PM	SiCl4 post valve closed
3/13/2012	1:06:00 PM	Main Vac valve closed
3/13/2012	1:06:00 PM	Bypass valve closed
3/13/2012	1:06:00 PM	Bubbler valve closed
3/13/2012	1:06:00 PM	Helium MFC set to  0.000000
3/13/2012	1:06:00 PM	H2 MFC set to  0.000000
3/13/2012	1:06:00 PM	BCl3 MFC set to  0.000000
3/13/2012	1:06:00 PM	PH3 MFC set to  0.000000
3/13/2012	1:06:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:06:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:06:00 PM	Tube furnace set to 0
3/13/2012	1:06:01 PM	Run finished at 1:06 PM
3/13/2012	1:31:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	1:31:49 PM	Recipe started at 1:31 PM
3/13/2012	1:31:49 PM	Helium valve closed
3/13/2012	1:31:49 PM	H2 valve closed
3/13/2012	1:31:49 PM	BCl3 valve closed
3/13/2012	1:31:49 PM	PH3 valve closed
3/13/2012	1:31:49 PM	SiCl4 pre valve closed
3/13/2012	1:31:49 PM	SiCl4 post valve closed
3/13/2012	1:31:49 PM	Main Vac valve closed
3/13/2012	1:31:49 PM	Bypass valve closed
3/13/2012	1:31:49 PM	Bubbler valve closed
3/13/2012	1:31:49 PM	Helium MFC set to  0.000000
3/13/2012	1:31:49 PM	H2 MFC set to  0.000000
3/13/2012	1:31:49 PM	BCl3 MFC set to  0.000000
3/13/2012	1:31:49 PM	PH3 MFC set to  0.000000
3/13/2012	1:31:49 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:31:49 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:31:49 PM	Tube furnace set to 0
3/13/2012	1:31:52 PM	H2 valve closed
3/13/2012	1:31:52 PM	BCl3 valve closed
3/13/2012	1:31:52 PM	PH3 valve closed
3/13/2012	1:31:52 PM	SiCl4 pre valve closed
3/13/2012	1:31:52 PM	SiCl4 post valve closed
3/13/2012	1:31:52 PM	Main Vac valve closed
3/13/2012	1:31:52 PM	Bypass valve closed
3/13/2012	1:31:52 PM	Bubbler valve closed
3/13/2012	1:31:52 PM	Helium valve opened
3/13/2012	1:31:52 PM	Helium MFC set to  500.000000
3/13/2012	1:31:52 PM	H2 MFC set to  0.000000
3/13/2012	1:31:52 PM	BCl3 MFC set to  0.000000
3/13/2012	1:31:52 PM	PH3 MFC set to  0.000000
3/13/2012	1:31:52 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:31:52 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:31:52 PM	Tube furnace set to 0
3/13/2012	1:31:53 PM	Helium valve closed
3/13/2012	1:31:53 PM	H2 valve closed
3/13/2012	1:31:53 PM	BCl3 valve closed
3/13/2012	1:31:53 PM	PH3 valve closed
3/13/2012	1:31:53 PM	SiCl4 pre valve closed
3/13/2012	1:31:53 PM	SiCl4 post valve closed
3/13/2012	1:31:53 PM	Main Vac valve closed
3/13/2012	1:31:53 PM	Bypass valve closed
3/13/2012	1:31:53 PM	Bubbler valve closed
3/13/2012	1:31:53 PM	Helium MFC set to  0.000000
3/13/2012	1:31:53 PM	H2 MFC set to  0.000000
3/13/2012	1:31:54 PM	BCl3 MFC set to  0.000000
3/13/2012	1:31:54 PM	PH3 MFC set to  0.000000
3/13/2012	1:31:54 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:31:54 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:31:54 PM	Tube furnace set to 0
3/13/2012	1:31:55 PM	Run finished at 1:31 PM
3/13/2012	1:31:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	1:37:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	1:37:07 PM	Recipe started at 1:37 PM
3/13/2012	1:37:07 PM	Helium valve closed
3/13/2012	1:37:07 PM	H2 valve closed
3/13/2012	1:37:07 PM	BCl3 valve closed
3/13/2012	1:37:07 PM	PH3 valve closed
3/13/2012	1:37:07 PM	SiCl4 pre valve closed
3/13/2012	1:37:07 PM	SiCl4 post valve closed
3/13/2012	1:37:07 PM	Main Vac valve closed
3/13/2012	1:37:07 PM	Bubbler valve closed
3/13/2012	1:37:07 PM	Bypass valve opened
3/13/2012	1:37:07 PM	Helium MFC set to  0.000000
3/13/2012	1:37:07 PM	H2 MFC set to  0.000000
3/13/2012	1:37:07 PM	BCl3 MFC set to  0.000000
3/13/2012	1:37:07 PM	PH3 MFC set to  0.000000
3/13/2012	1:37:07 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:37:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:37:07 PM	Tube furnace set to 0
3/13/2012	1:38:09 PM	Helium valve closed
3/13/2012	1:38:09 PM	H2 valve closed
3/13/2012	1:38:09 PM	BCl3 valve closed
3/13/2012	1:38:09 PM	PH3 valve closed
3/13/2012	1:38:09 PM	SiCl4 pre valve closed
3/13/2012	1:38:09 PM	SiCl4 post valve closed
3/13/2012	1:38:09 PM	Main Vac valve closed
3/13/2012	1:38:09 PM	Bubbler valve closed
3/13/2012	1:38:09 PM	Bypass valve opened
3/13/2012	1:38:09 PM	Helium MFC set to  0.000000
3/13/2012	1:38:09 PM	H2 MFC set to  0.000000
3/13/2012	1:38:09 PM	BCl3 MFC set to  0.000000
3/13/2012	1:38:09 PM	PH3 MFC set to  0.000000
3/13/2012	1:38:09 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:38:09 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:38:09 PM	Tube furnace set to 0
3/13/2012	1:39:09 PM	Helium valve closed
3/13/2012	1:39:09 PM	H2 valve closed
3/13/2012	1:39:09 PM	BCl3 valve closed
3/13/2012	1:39:09 PM	PH3 valve closed
3/13/2012	1:39:09 PM	SiCl4 pre valve closed
3/13/2012	1:39:09 PM	SiCl4 post valve closed
3/13/2012	1:39:09 PM	Bypass valve closed
3/13/2012	1:39:09 PM	Bubbler valve closed
3/13/2012	1:39:09 PM	Main Vac valve opened
3/13/2012	1:39:09 PM	Helium MFC set to  0.000000
3/13/2012	1:39:09 PM	H2 MFC set to  0.000000
3/13/2012	1:39:09 PM	BCl3 MFC set to  0.000000
3/13/2012	1:39:09 PM	PH3 MFC set to  0.000000
3/13/2012	1:39:09 PM	SiCl4 MFC set to  0.000000
3/13/2012	1:39:09 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	1:39:09 PM	Tube furnace set to 0
3/13/2012	1:39:10 PM	Run finished at 1:39 PM
3/13/2012	1:39:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	2:05:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	2:05:33 PM	Recipe started at 2:05 PM
3/13/2012	2:05:34 PM	Helium valve closed
3/13/2012	2:05:34 PM	H2 valve closed
3/13/2012	2:05:34 PM	BCl3 valve closed
3/13/2012	2:05:34 PM	PH3 valve closed
3/13/2012	2:05:34 PM	SiCl4 pre valve closed
3/13/2012	2:05:34 PM	SiCl4 post valve closed
3/13/2012	2:05:34 PM	Main Vac valve closed
3/13/2012	2:05:34 PM	Bubbler valve closed
3/13/2012	2:05:34 PM	Bypass valve opened
3/13/2012	2:05:34 PM	Helium MFC set to  0.000000
3/13/2012	2:05:34 PM	H2 MFC set to  0.000000
3/13/2012	2:05:34 PM	BCl3 MFC set to  0.000000
3/13/2012	2:05:34 PM	PH3 MFC set to  0.000000
3/13/2012	2:05:34 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:05:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:05:34 PM	Tube furnace set to 0
3/13/2012	2:05:34 PM	Helium valve closed
3/13/2012	2:05:34 PM	H2 valve closed
3/13/2012	2:05:34 PM	BCl3 valve closed
3/13/2012	2:05:34 PM	PH3 valve closed
3/13/2012	2:05:34 PM	SiCl4 pre valve closed
3/13/2012	2:05:34 PM	SiCl4 post valve closed
3/13/2012	2:05:34 PM	Main Vac valve closed
3/13/2012	2:05:34 PM	Bubbler valve closed
3/13/2012	2:05:34 PM	Bypass valve opened
3/13/2012	2:05:34 PM	Helium MFC set to  0.000000
3/13/2012	2:05:34 PM	H2 MFC set to  0.000000
3/13/2012	2:05:34 PM	BCl3 MFC set to  0.000000
3/13/2012	2:05:34 PM	PH3 MFC set to  0.000000
3/13/2012	2:05:34 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:05:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:05:34 PM	Tube furnace set to 0
3/13/2012	2:05:45 PM	Helium valve closed
3/13/2012	2:05:45 PM	H2 valve closed
3/13/2012	2:05:45 PM	BCl3 valve closed
3/13/2012	2:05:45 PM	PH3 valve closed
3/13/2012	2:05:45 PM	SiCl4 pre valve closed
3/13/2012	2:05:45 PM	SiCl4 post valve closed
3/13/2012	2:05:45 PM	Bypass valve closed
3/13/2012	2:05:45 PM	Bubbler valve closed
3/13/2012	2:05:45 PM	Main Vac valve opened
3/13/2012	2:05:45 PM	Helium MFC set to  0.000000
3/13/2012	2:05:45 PM	H2 MFC set to  0.000000
3/13/2012	2:05:45 PM	BCl3 MFC set to  0.000000
3/13/2012	2:05:45 PM	PH3 MFC set to  0.000000
3/13/2012	2:05:45 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:05:45 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:05:45 PM	Tube furnace set to 0
3/13/2012	2:05:52 PM	H2 valve closed
3/13/2012	2:05:52 PM	BCl3 valve closed
3/13/2012	2:05:52 PM	PH3 valve closed
3/13/2012	2:05:52 PM	SiCl4 pre valve closed
3/13/2012	2:05:52 PM	SiCl4 post valve closed
3/13/2012	2:05:52 PM	Bypass valve closed
3/13/2012	2:05:52 PM	Bubbler valve closed
3/13/2012	2:05:52 PM	Helium valve opened
3/13/2012	2:05:52 PM	Main Vac valve opened
3/13/2012	2:05:52 PM	Helium MFC set to  20.000000
3/13/2012	2:05:52 PM	H2 MFC set to  0.000000
3/13/2012	2:05:52 PM	BCl3 MFC set to  0.000000
3/13/2012	2:05:52 PM	PH3 MFC set to  0.000000
3/13/2012	2:05:52 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:05:52 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:05:52 PM	Tube furnace set to 0
3/13/2012	2:06:22 PM	Helium valve closed
3/13/2012	2:06:22 PM	H2 valve closed
3/13/2012	2:06:22 PM	BCl3 valve closed
3/13/2012	2:06:22 PM	PH3 valve closed
3/13/2012	2:06:22 PM	SiCl4 pre valve closed
3/13/2012	2:06:22 PM	SiCl4 post valve closed
3/13/2012	2:06:22 PM	Bypass valve closed
3/13/2012	2:06:22 PM	Bubbler valve closed
3/13/2012	2:06:22 PM	Main Vac valve opened
3/13/2012	2:06:22 PM	Helium MFC set to  0.000000
3/13/2012	2:06:22 PM	H2 MFC set to  0.000000
3/13/2012	2:06:22 PM	BCl3 MFC set to  0.000000
3/13/2012	2:06:22 PM	PH3 MFC set to  0.000000
3/13/2012	2:06:22 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:06:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:06:23 PM	Tube furnace set to 0
3/13/2012	2:06:53 PM	H2 valve closed
3/13/2012	2:06:53 PM	BCl3 valve closed
3/13/2012	2:06:53 PM	PH3 valve closed
3/13/2012	2:06:53 PM	SiCl4 pre valve closed
3/13/2012	2:06:53 PM	SiCl4 post valve closed
3/13/2012	2:06:53 PM	Bypass valve closed
3/13/2012	2:06:53 PM	Bubbler valve closed
3/13/2012	2:06:53 PM	Helium valve opened
3/13/2012	2:06:53 PM	Main Vac valve opened
3/13/2012	2:06:53 PM	Helium MFC set to  20.000000
3/13/2012	2:06:53 PM	H2 MFC set to  0.000000
3/13/2012	2:06:53 PM	BCl3 MFC set to  0.000000
3/13/2012	2:06:53 PM	PH3 MFC set to  0.000000
3/13/2012	2:06:53 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:06:53 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:06:53 PM	Tube furnace set to 0
3/13/2012	2:07:23 PM	Helium valve closed
3/13/2012	2:07:23 PM	H2 valve closed
3/13/2012	2:07:23 PM	BCl3 valve closed
3/13/2012	2:07:23 PM	PH3 valve closed
3/13/2012	2:07:23 PM	SiCl4 pre valve closed
3/13/2012	2:07:23 PM	SiCl4 post valve closed
3/13/2012	2:07:23 PM	Bypass valve closed
3/13/2012	2:07:23 PM	Bubbler valve closed
3/13/2012	2:07:23 PM	Main Vac valve opened
3/13/2012	2:07:23 PM	Helium MFC set to  0.000000
3/13/2012	2:07:23 PM	H2 MFC set to  0.000000
3/13/2012	2:07:23 PM	BCl3 MFC set to  0.000000
3/13/2012	2:07:23 PM	PH3 MFC set to  0.000000
3/13/2012	2:07:23 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:07:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:07:23 PM	Tube furnace set to 0
3/13/2012	2:07:53 PM	H2 valve closed
3/13/2012	2:07:53 PM	BCl3 valve closed
3/13/2012	2:07:53 PM	PH3 valve closed
3/13/2012	2:07:53 PM	SiCl4 pre valve closed
3/13/2012	2:07:53 PM	SiCl4 post valve closed
3/13/2012	2:07:53 PM	Bypass valve closed
3/13/2012	2:07:53 PM	Bubbler valve closed
3/13/2012	2:07:53 PM	Helium valve opened
3/13/2012	2:07:53 PM	Main Vac valve opened
3/13/2012	2:07:53 PM	Helium MFC set to  20.000000
3/13/2012	2:07:53 PM	H2 MFC set to  0.000000
3/13/2012	2:07:53 PM	BCl3 MFC set to  0.000000
3/13/2012	2:07:53 PM	PH3 MFC set to  0.000000
3/13/2012	2:07:53 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:07:53 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:07:53 PM	Tube furnace set to 0
3/13/2012	2:08:23 PM	Helium valve closed
3/13/2012	2:08:23 PM	H2 valve closed
3/13/2012	2:08:23 PM	BCl3 valve closed
3/13/2012	2:08:23 PM	PH3 valve closed
3/13/2012	2:08:23 PM	SiCl4 pre valve closed
3/13/2012	2:08:23 PM	SiCl4 post valve closed
3/13/2012	2:08:23 PM	Bypass valve closed
3/13/2012	2:08:23 PM	Bubbler valve closed
3/13/2012	2:08:23 PM	Main Vac valve opened
3/13/2012	2:08:23 PM	Helium MFC set to  0.000000
3/13/2012	2:08:23 PM	H2 MFC set to  0.000000
3/13/2012	2:08:23 PM	BCl3 MFC set to  0.000000
3/13/2012	2:08:23 PM	PH3 MFC set to  0.000000
3/13/2012	2:08:23 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:08:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:08:23 PM	Tube furnace set to 0
3/13/2012	2:08:53 PM	H2 valve closed
3/13/2012	2:08:53 PM	BCl3 valve closed
3/13/2012	2:08:53 PM	PH3 valve closed
3/13/2012	2:08:53 PM	SiCl4 pre valve closed
3/13/2012	2:08:53 PM	SiCl4 post valve closed
3/13/2012	2:08:53 PM	Bypass valve closed
3/13/2012	2:08:53 PM	Bubbler valve closed
3/13/2012	2:08:53 PM	Helium valve opened
3/13/2012	2:08:53 PM	Main Vac valve opened
3/13/2012	2:08:53 PM	Helium MFC set to  20.000000
3/13/2012	2:08:53 PM	H2 MFC set to  0.000000
3/13/2012	2:08:53 PM	BCl3 MFC set to  0.000000
3/13/2012	2:08:53 PM	PH3 MFC set to  0.000000
3/13/2012	2:08:53 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:08:53 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:08:54 PM	Tube furnace set to 0
3/13/2012	2:09:24 PM	Helium valve closed
3/13/2012	2:09:24 PM	H2 valve closed
3/13/2012	2:09:24 PM	BCl3 valve closed
3/13/2012	2:09:24 PM	PH3 valve closed
3/13/2012	2:09:24 PM	SiCl4 pre valve closed
3/13/2012	2:09:24 PM	SiCl4 post valve closed
3/13/2012	2:09:24 PM	Bypass valve closed
3/13/2012	2:09:24 PM	Bubbler valve closed
3/13/2012	2:09:24 PM	Main Vac valve opened
3/13/2012	2:09:24 PM	Helium MFC set to  0.000000
3/13/2012	2:09:24 PM	H2 MFC set to  0.000000
3/13/2012	2:09:24 PM	BCl3 MFC set to  0.000000
3/13/2012	2:09:24 PM	PH3 MFC set to  0.000000
3/13/2012	2:09:24 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:09:24 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:09:24 PM	Tube furnace set to 0
3/13/2012	2:09:54 PM	H2 valve closed
3/13/2012	2:09:54 PM	BCl3 valve closed
3/13/2012	2:09:54 PM	PH3 valve closed
3/13/2012	2:09:54 PM	SiCl4 pre valve closed
3/13/2012	2:09:54 PM	SiCl4 post valve closed
3/13/2012	2:09:54 PM	Bypass valve closed
3/13/2012	2:09:54 PM	Bubbler valve closed
3/13/2012	2:09:54 PM	Helium valve opened
3/13/2012	2:09:54 PM	Main Vac valve opened
3/13/2012	2:09:54 PM	Helium MFC set to  20.000000
3/13/2012	2:09:54 PM	H2 MFC set to  0.000000
3/13/2012	2:09:54 PM	BCl3 MFC set to  0.000000
3/13/2012	2:09:54 PM	PH3 MFC set to  0.000000
3/13/2012	2:09:54 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:09:54 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:09:54 PM	Tube furnace set to 0
3/13/2012	2:10:24 PM	Helium valve closed
3/13/2012	2:10:24 PM	H2 valve closed
3/13/2012	2:10:24 PM	BCl3 valve closed
3/13/2012	2:10:24 PM	PH3 valve closed
3/13/2012	2:10:24 PM	SiCl4 pre valve closed
3/13/2012	2:10:24 PM	SiCl4 post valve closed
3/13/2012	2:10:24 PM	Bypass valve closed
3/13/2012	2:10:24 PM	Bubbler valve closed
3/13/2012	2:10:24 PM	Main Vac valve opened
3/13/2012	2:10:24 PM	Helium MFC set to  0.000000
3/13/2012	2:10:24 PM	H2 MFC set to  0.000000
3/13/2012	2:10:24 PM	BCl3 MFC set to  0.000000
3/13/2012	2:10:24 PM	PH3 MFC set to  0.000000
3/13/2012	2:10:24 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:10:24 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:10:24 PM	Tube furnace set to 0
3/13/2012	2:10:54 PM	H2 valve closed
3/13/2012	2:10:54 PM	BCl3 valve closed
3/13/2012	2:10:54 PM	PH3 valve closed
3/13/2012	2:10:54 PM	SiCl4 pre valve closed
3/13/2012	2:10:54 PM	SiCl4 post valve closed
3/13/2012	2:10:54 PM	Bypass valve closed
3/13/2012	2:10:54 PM	Bubbler valve closed
3/13/2012	2:10:54 PM	Helium valve opened
3/13/2012	2:10:54 PM	Main Vac valve opened
3/13/2012	2:10:54 PM	Helium MFC set to  20.000000
3/13/2012	2:10:54 PM	H2 MFC set to  0.000000
3/13/2012	2:10:54 PM	BCl3 MFC set to  0.000000
3/13/2012	2:10:54 PM	PH3 MFC set to  0.000000
3/13/2012	2:10:54 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:10:54 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:10:54 PM	Tube furnace set to 0
3/13/2012	2:11:24 PM	Helium valve closed
3/13/2012	2:11:24 PM	H2 valve closed
3/13/2012	2:11:24 PM	BCl3 valve closed
3/13/2012	2:11:24 PM	PH3 valve closed
3/13/2012	2:11:24 PM	SiCl4 pre valve closed
3/13/2012	2:11:24 PM	SiCl4 post valve closed
3/13/2012	2:11:24 PM	Bypass valve closed
3/13/2012	2:11:24 PM	Bubbler valve closed
3/13/2012	2:11:24 PM	Main Vac valve opened
3/13/2012	2:11:24 PM	Helium MFC set to  0.000000
3/13/2012	2:11:24 PM	H2 MFC set to  0.000000
3/13/2012	2:11:24 PM	BCl3 MFC set to  0.000000
3/13/2012	2:11:24 PM	PH3 MFC set to  0.000000
3/13/2012	2:11:24 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:11:24 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:11:25 PM	Tube furnace set to 0
3/13/2012	2:11:55 PM	H2 valve closed
3/13/2012	2:11:55 PM	BCl3 valve closed
3/13/2012	2:11:55 PM	PH3 valve closed
3/13/2012	2:11:55 PM	SiCl4 pre valve closed
3/13/2012	2:11:55 PM	SiCl4 post valve closed
3/13/2012	2:11:55 PM	Bypass valve closed
3/13/2012	2:11:55 PM	Bubbler valve closed
3/13/2012	2:11:55 PM	Helium valve opened
3/13/2012	2:11:55 PM	Main Vac valve opened
3/13/2012	2:11:55 PM	Helium MFC set to  20.000000
3/13/2012	2:11:55 PM	H2 MFC set to  0.000000
3/13/2012	2:11:55 PM	BCl3 MFC set to  0.000000
3/13/2012	2:11:55 PM	PH3 MFC set to  0.000000
3/13/2012	2:11:55 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:11:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:11:55 PM	Tube furnace set to 0
3/13/2012	2:12:25 PM	Helium valve closed
3/13/2012	2:12:25 PM	H2 valve closed
3/13/2012	2:12:25 PM	BCl3 valve closed
3/13/2012	2:12:25 PM	PH3 valve closed
3/13/2012	2:12:25 PM	SiCl4 pre valve closed
3/13/2012	2:12:25 PM	SiCl4 post valve closed
3/13/2012	2:12:25 PM	Bypass valve closed
3/13/2012	2:12:25 PM	Bubbler valve closed
3/13/2012	2:12:25 PM	Main Vac valve opened
3/13/2012	2:12:25 PM	Helium MFC set to  0.000000
3/13/2012	2:12:25 PM	H2 MFC set to  0.000000
3/13/2012	2:12:25 PM	BCl3 MFC set to  0.000000
3/13/2012	2:12:25 PM	PH3 MFC set to  0.000000
3/13/2012	2:12:25 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:12:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:12:25 PM	Tube furnace set to 0
3/13/2012	2:12:55 PM	H2 valve closed
3/13/2012	2:12:55 PM	BCl3 valve closed
3/13/2012	2:12:55 PM	PH3 valve closed
3/13/2012	2:12:55 PM	SiCl4 pre valve closed
3/13/2012	2:12:55 PM	SiCl4 post valve closed
3/13/2012	2:12:55 PM	Bypass valve closed
3/13/2012	2:12:55 PM	Bubbler valve closed
3/13/2012	2:12:55 PM	Helium valve opened
3/13/2012	2:12:55 PM	Main Vac valve opened
3/13/2012	2:12:55 PM	Helium MFC set to  20.000000
3/13/2012	2:12:55 PM	H2 MFC set to  0.000000
3/13/2012	2:12:55 PM	BCl3 MFC set to  0.000000
3/13/2012	2:12:55 PM	PH3 MFC set to  0.000000
3/13/2012	2:12:55 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:12:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:12:55 PM	Tube furnace set to 0
3/13/2012	2:13:25 PM	Helium valve closed
3/13/2012	2:13:25 PM	H2 valve closed
3/13/2012	2:13:25 PM	BCl3 valve closed
3/13/2012	2:13:25 PM	PH3 valve closed
3/13/2012	2:13:25 PM	SiCl4 pre valve closed
3/13/2012	2:13:25 PM	SiCl4 post valve closed
3/13/2012	2:13:25 PM	Bypass valve closed
3/13/2012	2:13:25 PM	Bubbler valve closed
3/13/2012	2:13:25 PM	Main Vac valve opened
3/13/2012	2:13:25 PM	Helium MFC set to  0.000000
3/13/2012	2:13:25 PM	H2 MFC set to  0.000000
3/13/2012	2:13:25 PM	BCl3 MFC set to  0.000000
3/13/2012	2:13:25 PM	PH3 MFC set to  0.000000
3/13/2012	2:13:25 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:13:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:13:25 PM	Tube furnace set to 0
3/13/2012	2:13:55 PM	H2 valve closed
3/13/2012	2:13:55 PM	BCl3 valve closed
3/13/2012	2:13:55 PM	PH3 valve closed
3/13/2012	2:13:55 PM	SiCl4 pre valve closed
3/13/2012	2:13:55 PM	SiCl4 post valve closed
3/13/2012	2:13:55 PM	Bypass valve closed
3/13/2012	2:13:55 PM	Bubbler valve closed
3/13/2012	2:13:55 PM	Helium valve opened
3/13/2012	2:13:55 PM	Main Vac valve opened
3/13/2012	2:13:55 PM	Helium MFC set to  20.000000
3/13/2012	2:13:55 PM	H2 MFC set to  0.000000
3/13/2012	2:13:55 PM	BCl3 MFC set to  0.000000
3/13/2012	2:13:55 PM	PH3 MFC set to  0.000000
3/13/2012	2:13:55 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:13:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:13:56 PM	Tube furnace set to 0
3/13/2012	2:14:26 PM	Helium valve closed
3/13/2012	2:14:26 PM	H2 valve closed
3/13/2012	2:14:26 PM	BCl3 valve closed
3/13/2012	2:14:26 PM	PH3 valve closed
3/13/2012	2:14:26 PM	SiCl4 pre valve closed
3/13/2012	2:14:26 PM	SiCl4 post valve closed
3/13/2012	2:14:26 PM	Bypass valve closed
3/13/2012	2:14:26 PM	Bubbler valve closed
3/13/2012	2:14:26 PM	Main Vac valve opened
3/13/2012	2:14:26 PM	Helium MFC set to  0.000000
3/13/2012	2:14:26 PM	H2 MFC set to  0.000000
3/13/2012	2:14:26 PM	BCl3 MFC set to  0.000000
3/13/2012	2:14:26 PM	PH3 MFC set to  0.000000
3/13/2012	2:14:26 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:14:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:14:26 PM	Tube furnace set to 0
3/13/2012	2:14:56 PM	H2 valve closed
3/13/2012	2:14:56 PM	BCl3 valve closed
3/13/2012	2:14:56 PM	PH3 valve closed
3/13/2012	2:14:56 PM	SiCl4 pre valve closed
3/13/2012	2:14:56 PM	SiCl4 post valve closed
3/13/2012	2:14:56 PM	Bypass valve closed
3/13/2012	2:14:56 PM	Bubbler valve closed
3/13/2012	2:14:56 PM	Helium valve opened
3/13/2012	2:14:56 PM	Main Vac valve opened
3/13/2012	2:14:56 PM	Helium MFC set to  20.000000
3/13/2012	2:14:56 PM	H2 MFC set to  0.000000
3/13/2012	2:14:56 PM	BCl3 MFC set to  0.000000
3/13/2012	2:14:56 PM	PH3 MFC set to  0.000000
3/13/2012	2:14:56 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:14:56 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:14:56 PM	Tube furnace set to 0
3/13/2012	2:15:26 PM	Helium valve closed
3/13/2012	2:15:26 PM	H2 valve closed
3/13/2012	2:15:26 PM	BCl3 valve closed
3/13/2012	2:15:26 PM	PH3 valve closed
3/13/2012	2:15:26 PM	SiCl4 pre valve closed
3/13/2012	2:15:26 PM	SiCl4 post valve closed
3/13/2012	2:15:26 PM	Bypass valve closed
3/13/2012	2:15:26 PM	Bubbler valve closed
3/13/2012	2:15:26 PM	Main Vac valve opened
3/13/2012	2:15:26 PM	Helium MFC set to  0.000000
3/13/2012	2:15:26 PM	H2 MFC set to  0.000000
3/13/2012	2:15:26 PM	BCl3 MFC set to  0.000000
3/13/2012	2:15:26 PM	PH3 MFC set to  0.000000
3/13/2012	2:15:26 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:15:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:15:26 PM	Tube furnace set to 0
3/13/2012	2:15:27 PM	Run finished at 2:15 PM
3/13/2012	2:15:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	2:24:57 PM	Main Vac valve closed
3/13/2012	2:25:13 PM	Main Vac valve opened
3/13/2012	2:26:11 PM	Recipe started at 2:26 PM
3/13/2012	2:26:11 PM	Helium valve closed
3/13/2012	2:26:11 PM	H2 valve closed
3/13/2012	2:26:11 PM	BCl3 valve closed
3/13/2012	2:26:11 PM	PH3 valve closed
3/13/2012	2:26:11 PM	SiCl4 pre valve closed
3/13/2012	2:26:11 PM	SiCl4 post valve closed
3/13/2012	2:26:11 PM	Main Vac valve closed
3/13/2012	2:26:11 PM	Bypass valve closed
3/13/2012	2:26:11 PM	Bubbler valve closed
3/13/2012	2:26:11 PM	Helium MFC set to  0.000000
3/13/2012	2:26:11 PM	H2 MFC set to  0.000000
3/13/2012	2:26:11 PM	BCl3 MFC set to  0.000000
3/13/2012	2:26:11 PM	PH3 MFC set to  0.000000
3/13/2012	2:26:11 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:26:11 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:26:11 PM	Tube furnace set to 0
3/13/2012	2:26:14 PM	Helium valve closed
3/13/2012	2:26:14 PM	BCl3 valve closed
3/13/2012	2:26:14 PM	PH3 valve closed
3/13/2012	2:26:14 PM	SiCl4 pre valve closed
3/13/2012	2:26:14 PM	SiCl4 post valve closed
3/13/2012	2:26:14 PM	Main Vac valve closed
3/13/2012	2:26:14 PM	Bypass valve closed
3/13/2012	2:26:14 PM	Bubbler valve closed
3/13/2012	2:26:14 PM	H2 valve opened
3/13/2012	2:26:14 PM	Helium MFC set to  0.000000
3/13/2012	2:26:14 PM	H2 MFC set to  500.000000
3/13/2012	2:26:14 PM	BCl3 MFC set to  0.000000
3/13/2012	2:26:14 PM	PH3 MFC set to  0.000000
3/13/2012	2:26:14 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:26:14 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:26:14 PM	Tube furnace set to 0
3/13/2012	2:27:22 PM	Helium valve closed
3/13/2012	2:27:22 PM	BCl3 valve closed
3/13/2012	2:27:22 PM	PH3 valve closed
3/13/2012	2:27:22 PM	SiCl4 pre valve closed
3/13/2012	2:27:22 PM	SiCl4 post valve closed
3/13/2012	2:27:22 PM	Main Vac valve closed
3/13/2012	2:27:22 PM	Bypass valve closed
3/13/2012	2:27:22 PM	H2 valve opened
3/13/2012	2:27:22 PM	Bubbler valve opened
3/13/2012	2:27:22 PM	Helium MFC set to  0.000000
3/13/2012	2:27:22 PM	H2 MFC set to  500.000000
3/13/2012	2:27:22 PM	BCl3 MFC set to  0.000000
3/13/2012	2:27:22 PM	PH3 MFC set to  0.000000
3/13/2012	2:27:22 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:27:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:27:22 PM	Tube furnace set to 0
3/13/2012	2:27:23 PM	Helium valve closed
3/13/2012	2:27:23 PM	BCl3 valve closed
3/13/2012	2:27:23 PM	PH3 valve closed
3/13/2012	2:27:23 PM	SiCl4 pre valve closed
3/13/2012	2:27:23 PM	SiCl4 post valve closed
3/13/2012	2:27:23 PM	Main Vac valve closed
3/13/2012	2:27:23 PM	Bypass valve closed
3/13/2012	2:27:23 PM	H2 valve opened
3/13/2012	2:27:23 PM	Bubbler valve opened
3/13/2012	2:27:23 PM	Helium MFC set to  0.000000
3/13/2012	2:27:23 PM	H2 MFC set to  500.000000
3/13/2012	2:27:23 PM	BCl3 MFC set to  0.000000
3/13/2012	2:27:23 PM	PH3 MFC set to  0.000000
3/13/2012	2:27:23 PM	SiCl4 MFC set to  0.000000
3/13/2012	2:27:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:27:23 PM	Tube furnace set to 950
3/13/2012	2:47:23 PM	Helium valve closed
3/13/2012	2:47:23 PM	BCl3 valve closed
3/13/2012	2:47:23 PM	PH3 valve closed
3/13/2012	2:47:23 PM	Main Vac valve closed
3/13/2012	2:47:23 PM	Bypass valve closed
3/13/2012	2:47:23 PM	H2 valve opened
3/13/2012	2:47:23 PM	SiCl4 pre valve opened
3/13/2012	2:47:23 PM	SiCl4 post valve opened
3/13/2012	2:47:23 PM	Bubbler valve opened
3/13/2012	2:47:23 PM	Helium MFC set to  0.000000
3/13/2012	2:47:23 PM	H2 MFC set to  500.000000
3/13/2012	2:47:23 PM	BCl3 MFC set to  0.000000
3/13/2012	2:47:23 PM	PH3 MFC set to  0.000000
3/13/2012	2:47:23 PM	SiCl4 MFC set to  20.000000
3/13/2012	2:47:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	2:47:23 PM	Tube furnace set to 950
3/13/2012	3:07:23 PM	Helium valve closed
3/13/2012	3:07:23 PM	BCl3 valve closed
3/13/2012	3:07:23 PM	PH3 valve closed
3/13/2012	3:07:23 PM	SiCl4 pre valve closed
3/13/2012	3:07:23 PM	SiCl4 post valve closed
3/13/2012	3:07:23 PM	Main Vac valve closed
3/13/2012	3:07:23 PM	Bypass valve closed
3/13/2012	3:07:23 PM	H2 valve opened
3/13/2012	3:07:23 PM	Bubbler valve opened
3/13/2012	3:07:23 PM	Helium MFC set to  0.000000
3/13/2012	3:07:23 PM	H2 MFC set to  500.000000
3/13/2012	3:07:23 PM	BCl3 MFC set to  0.000000
3/13/2012	3:07:23 PM	PH3 MFC set to  0.000000
3/13/2012	3:07:23 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:07:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:07:24 PM	Tube furnace set to 750
3/13/2012	3:10:45 PM	H2 valve closed
3/13/2012	3:10:45 PM	BCl3 valve closed
3/13/2012	3:10:45 PM	PH3 valve closed
3/13/2012	3:10:45 PM	SiCl4 pre valve closed
3/13/2012	3:10:45 PM	SiCl4 post valve closed
3/13/2012	3:10:45 PM	Main Vac valve closed
3/13/2012	3:10:45 PM	Bypass valve closed
3/13/2012	3:10:45 PM	Helium valve opened
3/13/2012	3:10:45 PM	Bubbler valve opened
3/13/2012	3:10:45 PM	Helium MFC set to  500.000000
3/13/2012	3:10:45 PM	H2 MFC set to  0.000000
3/13/2012	3:10:45 PM	BCl3 MFC set to  0.000000
3/13/2012	3:10:45 PM	PH3 MFC set to  0.000000
3/13/2012	3:10:45 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:10:45 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:10:45 PM	Tube furnace set to 0
3/13/2012	3:30:45 PM	Helium valve closed
3/13/2012	3:30:45 PM	H2 valve closed
3/13/2012	3:30:45 PM	BCl3 valve closed
3/13/2012	3:30:45 PM	PH3 valve closed
3/13/2012	3:30:45 PM	SiCl4 pre valve closed
3/13/2012	3:30:45 PM	SiCl4 post valve closed
3/13/2012	3:30:45 PM	Main Vac valve closed
3/13/2012	3:30:45 PM	Bypass valve closed
3/13/2012	3:30:45 PM	Bubbler valve closed
3/13/2012	3:30:45 PM	Helium MFC set to  0.000000
3/13/2012	3:30:45 PM	H2 MFC set to  0.000000
3/13/2012	3:30:45 PM	BCl3 MFC set to  0.000000
3/13/2012	3:30:45 PM	PH3 MFC set to  0.000000
3/13/2012	3:30:45 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:30:45 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:30:45 PM	Tube furnace set to 0
3/13/2012	3:30:46 PM	Run finished at 3:30 PM
3/13/2012	3:30:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	3:30:52 PM	Recipe started at 3:30 PM
3/13/2012	3:30:52 PM	Helium valve closed
3/13/2012	3:30:52 PM	H2 valve closed
3/13/2012	3:30:52 PM	BCl3 valve closed
3/13/2012	3:30:52 PM	PH3 valve closed
3/13/2012	3:30:52 PM	SiCl4 pre valve closed
3/13/2012	3:30:52 PM	SiCl4 post valve closed
3/13/2012	3:30:52 PM	Main Vac valve closed
3/13/2012	3:30:52 PM	Bypass valve closed
3/13/2012	3:30:52 PM	Bubbler valve closed
3/13/2012	3:30:52 PM	Helium MFC set to  0.000000
3/13/2012	3:30:52 PM	H2 MFC set to  0.000000
3/13/2012	3:30:52 PM	BCl3 MFC set to  0.000000
3/13/2012	3:30:52 PM	PH3 MFC set to  0.000000
3/13/2012	3:30:52 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:30:52 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:30:52 PM	Tube furnace set to 0
3/13/2012	3:30:55 PM	H2 valve closed
3/13/2012	3:30:55 PM	BCl3 valve closed
3/13/2012	3:30:55 PM	PH3 valve closed
3/13/2012	3:30:55 PM	SiCl4 pre valve closed
3/13/2012	3:30:55 PM	SiCl4 post valve closed
3/13/2012	3:30:55 PM	Main Vac valve closed
3/13/2012	3:30:55 PM	Bypass valve closed
3/13/2012	3:30:55 PM	Bubbler valve closed
3/13/2012	3:30:55 PM	Helium valve opened
3/13/2012	3:30:55 PM	Helium MFC set to  500.000000
3/13/2012	3:30:55 PM	H2 MFC set to  0.000000
3/13/2012	3:30:55 PM	BCl3 MFC set to  0.000000
3/13/2012	3:30:55 PM	PH3 MFC set to  0.000000
3/13/2012	3:30:55 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:30:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:30:55 PM	Tube furnace set to 0
3/13/2012	3:30:55 PM	Helium valve closed
3/13/2012	3:30:55 PM	H2 valve closed
3/13/2012	3:30:55 PM	BCl3 valve closed
3/13/2012	3:30:55 PM	PH3 valve closed
3/13/2012	3:30:55 PM	SiCl4 pre valve closed
3/13/2012	3:30:55 PM	SiCl4 post valve closed
3/13/2012	3:30:55 PM	Main Vac valve closed
3/13/2012	3:30:55 PM	Bypass valve closed
3/13/2012	3:30:55 PM	Bubbler valve closed
3/13/2012	3:30:55 PM	Helium MFC set to  0.000000
3/13/2012	3:30:55 PM	H2 MFC set to  0.000000
3/13/2012	3:30:55 PM	BCl3 MFC set to  0.000000
3/13/2012	3:30:55 PM	PH3 MFC set to  0.000000
3/13/2012	3:30:55 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:30:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:30:55 PM	Tube furnace set to 0
3/13/2012	3:30:56 PM	Run finished at 3:30 PM
3/13/2012	3:30:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	3:37:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	3:37:34 PM	Recipe started at 3:37 PM
3/13/2012	3:37:34 PM	Helium valve closed
3/13/2012	3:37:34 PM	H2 valve closed
3/13/2012	3:37:34 PM	BCl3 valve closed
3/13/2012	3:37:34 PM	PH3 valve closed
3/13/2012	3:37:34 PM	SiCl4 pre valve closed
3/13/2012	3:37:34 PM	SiCl4 post valve closed
3/13/2012	3:37:34 PM	Main Vac valve closed
3/13/2012	3:37:34 PM	Bubbler valve closed
3/13/2012	3:37:34 PM	Bypass valve opened
3/13/2012	3:37:34 PM	Helium MFC set to  0.000000
3/13/2012	3:37:34 PM	H2 MFC set to  0.000000
3/13/2012	3:37:34 PM	BCl3 MFC set to  0.000000
3/13/2012	3:37:34 PM	PH3 MFC set to  0.000000
3/13/2012	3:37:34 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:37:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:37:35 PM	Tube furnace set to 0
3/13/2012	3:38:38 PM	Helium valve closed
3/13/2012	3:38:38 PM	H2 valve closed
3/13/2012	3:38:38 PM	BCl3 valve closed
3/13/2012	3:38:38 PM	PH3 valve closed
3/13/2012	3:38:38 PM	SiCl4 pre valve closed
3/13/2012	3:38:38 PM	SiCl4 post valve closed
3/13/2012	3:38:38 PM	Main Vac valve closed
3/13/2012	3:38:38 PM	Bubbler valve closed
3/13/2012	3:38:38 PM	Bypass valve opened
3/13/2012	3:38:38 PM	Helium MFC set to  0.000000
3/13/2012	3:38:38 PM	H2 MFC set to  0.000000
3/13/2012	3:38:38 PM	BCl3 MFC set to  0.000000
3/13/2012	3:38:38 PM	PH3 MFC set to  0.000000
3/13/2012	3:38:38 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:38:38 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:38:38 PM	Tube furnace set to 0
3/13/2012	3:39:38 PM	Helium valve closed
3/13/2012	3:39:38 PM	H2 valve closed
3/13/2012	3:39:38 PM	BCl3 valve closed
3/13/2012	3:39:38 PM	PH3 valve closed
3/13/2012	3:39:38 PM	SiCl4 pre valve closed
3/13/2012	3:39:38 PM	SiCl4 post valve closed
3/13/2012	3:39:38 PM	Bypass valve closed
3/13/2012	3:39:38 PM	Bubbler valve closed
3/13/2012	3:39:38 PM	Main Vac valve opened
3/13/2012	3:39:38 PM	Helium MFC set to  0.000000
3/13/2012	3:39:38 PM	H2 MFC set to  0.000000
3/13/2012	3:39:38 PM	BCl3 MFC set to  0.000000
3/13/2012	3:39:38 PM	PH3 MFC set to  0.000000
3/13/2012	3:39:38 PM	SiCl4 MFC set to  0.000000
3/13/2012	3:39:38 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	3:39:38 PM	Tube furnace set to 0
3/13/2012	3:39:39 PM	Run finished at 3:39 PM
3/13/2012	3:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	4:01:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	4:01:53 PM	Recipe started at 4:01 PM
3/13/2012	4:01:53 PM	Helium valve closed
3/13/2012	4:01:53 PM	H2 valve closed
3/13/2012	4:01:53 PM	BCl3 valve closed
3/13/2012	4:01:53 PM	PH3 valve closed
3/13/2012	4:01:53 PM	SiCl4 pre valve closed
3/13/2012	4:01:53 PM	SiCl4 post valve closed
3/13/2012	4:01:53 PM	Main Vac valve closed
3/13/2012	4:01:53 PM	Bubbler valve closed
3/13/2012	4:01:53 PM	Bypass valve opened
3/13/2012	4:01:53 PM	Helium MFC set to  0.000000
3/13/2012	4:01:53 PM	H2 MFC set to  0.000000
3/13/2012	4:01:53 PM	BCl3 MFC set to  0.000000
3/13/2012	4:01:53 PM	PH3 MFC set to  0.000000
3/13/2012	4:01:53 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:01:53 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:01:53 PM	Tube furnace set to 0
3/13/2012	4:01:53 PM	Helium valve closed
3/13/2012	4:01:53 PM	H2 valve closed
3/13/2012	4:01:53 PM	BCl3 valve closed
3/13/2012	4:01:53 PM	PH3 valve closed
3/13/2012	4:01:53 PM	SiCl4 pre valve closed
3/13/2012	4:01:53 PM	SiCl4 post valve closed
3/13/2012	4:01:53 PM	Main Vac valve closed
3/13/2012	4:01:53 PM	Bubbler valve closed
3/13/2012	4:01:53 PM	Bypass valve opened
3/13/2012	4:01:53 PM	Helium MFC set to  0.000000
3/13/2012	4:01:53 PM	H2 MFC set to  0.000000
3/13/2012	4:01:53 PM	BCl3 MFC set to  0.000000
3/13/2012	4:01:53 PM	PH3 MFC set to  0.000000
3/13/2012	4:01:53 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:01:53 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:01:53 PM	Tube furnace set to 0
3/13/2012	4:01:57 PM	Helium valve closed
3/13/2012	4:01:57 PM	H2 valve closed
3/13/2012	4:01:57 PM	BCl3 valve closed
3/13/2012	4:01:57 PM	PH3 valve closed
3/13/2012	4:01:57 PM	SiCl4 pre valve closed
3/13/2012	4:01:57 PM	SiCl4 post valve closed
3/13/2012	4:01:57 PM	Bypass valve closed
3/13/2012	4:01:57 PM	Bubbler valve closed
3/13/2012	4:01:57 PM	Main Vac valve opened
3/13/2012	4:01:57 PM	Helium MFC set to  0.000000
3/13/2012	4:01:57 PM	H2 MFC set to  0.000000
3/13/2012	4:01:57 PM	BCl3 MFC set to  0.000000
3/13/2012	4:01:57 PM	PH3 MFC set to  0.000000
3/13/2012	4:01:57 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:01:57 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:01:58 PM	Tube furnace set to 0
3/13/2012	4:02:11 PM	H2 valve closed
3/13/2012	4:02:11 PM	BCl3 valve closed
3/13/2012	4:02:11 PM	PH3 valve closed
3/13/2012	4:02:11 PM	SiCl4 pre valve closed
3/13/2012	4:02:11 PM	SiCl4 post valve closed
3/13/2012	4:02:11 PM	Bypass valve closed
3/13/2012	4:02:11 PM	Bubbler valve closed
3/13/2012	4:02:11 PM	Helium valve opened
3/13/2012	4:02:11 PM	Main Vac valve opened
3/13/2012	4:02:11 PM	Helium MFC set to  20.000000
3/13/2012	4:02:11 PM	H2 MFC set to  0.000000
3/13/2012	4:02:11 PM	BCl3 MFC set to  0.000000
3/13/2012	4:02:11 PM	PH3 MFC set to  0.000000
3/13/2012	4:02:11 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:02:11 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:02:11 PM	Tube furnace set to 0
3/13/2012	4:02:41 PM	Helium valve closed
3/13/2012	4:02:41 PM	H2 valve closed
3/13/2012	4:02:41 PM	BCl3 valve closed
3/13/2012	4:02:41 PM	PH3 valve closed
3/13/2012	4:02:41 PM	SiCl4 pre valve closed
3/13/2012	4:02:41 PM	SiCl4 post valve closed
3/13/2012	4:02:41 PM	Bypass valve closed
3/13/2012	4:02:41 PM	Bubbler valve closed
3/13/2012	4:02:41 PM	Main Vac valve opened
3/13/2012	4:02:41 PM	Helium MFC set to  0.000000
3/13/2012	4:02:41 PM	H2 MFC set to  0.000000
3/13/2012	4:02:41 PM	BCl3 MFC set to  0.000000
3/13/2012	4:02:41 PM	PH3 MFC set to  0.000000
3/13/2012	4:02:41 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:02:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:02:42 PM	Tube furnace set to 0
3/13/2012	4:03:12 PM	H2 valve closed
3/13/2012	4:03:12 PM	BCl3 valve closed
3/13/2012	4:03:12 PM	PH3 valve closed
3/13/2012	4:03:12 PM	SiCl4 pre valve closed
3/13/2012	4:03:12 PM	SiCl4 post valve closed
3/13/2012	4:03:12 PM	Bypass valve closed
3/13/2012	4:03:12 PM	Bubbler valve closed
3/13/2012	4:03:12 PM	Helium valve opened
3/13/2012	4:03:12 PM	Main Vac valve opened
3/13/2012	4:03:12 PM	Helium MFC set to  20.000000
3/13/2012	4:03:12 PM	H2 MFC set to  0.000000
3/13/2012	4:03:12 PM	BCl3 MFC set to  0.000000
3/13/2012	4:03:12 PM	PH3 MFC set to  0.000000
3/13/2012	4:03:12 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:03:12 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:03:12 PM	Tube furnace set to 0
3/13/2012	4:03:42 PM	Helium valve closed
3/13/2012	4:03:42 PM	H2 valve closed
3/13/2012	4:03:42 PM	BCl3 valve closed
3/13/2012	4:03:42 PM	PH3 valve closed
3/13/2012	4:03:42 PM	SiCl4 pre valve closed
3/13/2012	4:03:42 PM	SiCl4 post valve closed
3/13/2012	4:03:42 PM	Bypass valve closed
3/13/2012	4:03:42 PM	Bubbler valve closed
3/13/2012	4:03:42 PM	Main Vac valve opened
3/13/2012	4:03:42 PM	Helium MFC set to  0.000000
3/13/2012	4:03:42 PM	H2 MFC set to  0.000000
3/13/2012	4:03:42 PM	BCl3 MFC set to  0.000000
3/13/2012	4:03:42 PM	PH3 MFC set to  0.000000
3/13/2012	4:03:42 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:03:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:03:42 PM	Tube furnace set to 0
3/13/2012	4:04:12 PM	H2 valve closed
3/13/2012	4:04:12 PM	BCl3 valve closed
3/13/2012	4:04:12 PM	PH3 valve closed
3/13/2012	4:04:12 PM	SiCl4 pre valve closed
3/13/2012	4:04:12 PM	SiCl4 post valve closed
3/13/2012	4:04:12 PM	Bypass valve closed
3/13/2012	4:04:12 PM	Bubbler valve closed
3/13/2012	4:04:12 PM	Helium valve opened
3/13/2012	4:04:12 PM	Main Vac valve opened
3/13/2012	4:04:12 PM	Helium MFC set to  20.000000
3/13/2012	4:04:12 PM	H2 MFC set to  0.000000
3/13/2012	4:04:12 PM	BCl3 MFC set to  0.000000
3/13/2012	4:04:12 PM	PH3 MFC set to  0.000000
3/13/2012	4:04:12 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:04:12 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:04:12 PM	Tube furnace set to 0
3/13/2012	4:04:42 PM	Helium valve closed
3/13/2012	4:04:42 PM	H2 valve closed
3/13/2012	4:04:42 PM	BCl3 valve closed
3/13/2012	4:04:42 PM	PH3 valve closed
3/13/2012	4:04:42 PM	SiCl4 pre valve closed
3/13/2012	4:04:42 PM	SiCl4 post valve closed
3/13/2012	4:04:42 PM	Bypass valve closed
3/13/2012	4:04:42 PM	Bubbler valve closed
3/13/2012	4:04:42 PM	Main Vac valve opened
3/13/2012	4:04:42 PM	Helium MFC set to  0.000000
3/13/2012	4:04:42 PM	H2 MFC set to  0.000000
3/13/2012	4:04:42 PM	BCl3 MFC set to  0.000000
3/13/2012	4:04:42 PM	PH3 MFC set to  0.000000
3/13/2012	4:04:42 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:04:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:04:42 PM	Tube furnace set to 0
3/13/2012	4:05:12 PM	H2 valve closed
3/13/2012	4:05:12 PM	BCl3 valve closed
3/13/2012	4:05:12 PM	PH3 valve closed
3/13/2012	4:05:12 PM	SiCl4 pre valve closed
3/13/2012	4:05:12 PM	SiCl4 post valve closed
3/13/2012	4:05:12 PM	Bypass valve closed
3/13/2012	4:05:12 PM	Bubbler valve closed
3/13/2012	4:05:12 PM	Helium valve opened
3/13/2012	4:05:12 PM	Main Vac valve opened
3/13/2012	4:05:12 PM	Helium MFC set to  20.000000
3/13/2012	4:05:12 PM	H2 MFC set to  0.000000
3/13/2012	4:05:12 PM	BCl3 MFC set to  0.000000
3/13/2012	4:05:12 PM	PH3 MFC set to  0.000000
3/13/2012	4:05:12 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:05:12 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:05:13 PM	Tube furnace set to 0
3/13/2012	4:05:43 PM	Helium valve closed
3/13/2012	4:05:43 PM	H2 valve closed
3/13/2012	4:05:43 PM	BCl3 valve closed
3/13/2012	4:05:43 PM	PH3 valve closed
3/13/2012	4:05:43 PM	SiCl4 pre valve closed
3/13/2012	4:05:43 PM	SiCl4 post valve closed
3/13/2012	4:05:43 PM	Bypass valve closed
3/13/2012	4:05:43 PM	Bubbler valve closed
3/13/2012	4:05:43 PM	Main Vac valve opened
3/13/2012	4:05:43 PM	Helium MFC set to  0.000000
3/13/2012	4:05:43 PM	H2 MFC set to  0.000000
3/13/2012	4:05:43 PM	BCl3 MFC set to  0.000000
3/13/2012	4:05:43 PM	PH3 MFC set to  0.000000
3/13/2012	4:05:43 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:05:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:05:43 PM	Tube furnace set to 0
3/13/2012	4:06:13 PM	H2 valve closed
3/13/2012	4:06:13 PM	BCl3 valve closed
3/13/2012	4:06:13 PM	PH3 valve closed
3/13/2012	4:06:13 PM	SiCl4 pre valve closed
3/13/2012	4:06:13 PM	SiCl4 post valve closed
3/13/2012	4:06:13 PM	Bypass valve closed
3/13/2012	4:06:13 PM	Bubbler valve closed
3/13/2012	4:06:13 PM	Helium valve opened
3/13/2012	4:06:13 PM	Main Vac valve opened
3/13/2012	4:06:13 PM	Helium MFC set to  20.000000
3/13/2012	4:06:13 PM	H2 MFC set to  0.000000
3/13/2012	4:06:13 PM	BCl3 MFC set to  0.000000
3/13/2012	4:06:13 PM	PH3 MFC set to  0.000000
3/13/2012	4:06:13 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:06:13 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:06:13 PM	Tube furnace set to 0
3/13/2012	4:06:43 PM	Helium valve closed
3/13/2012	4:06:43 PM	H2 valve closed
3/13/2012	4:06:43 PM	BCl3 valve closed
3/13/2012	4:06:43 PM	PH3 valve closed
3/13/2012	4:06:43 PM	SiCl4 pre valve closed
3/13/2012	4:06:43 PM	SiCl4 post valve closed
3/13/2012	4:06:43 PM	Bypass valve closed
3/13/2012	4:06:43 PM	Bubbler valve closed
3/13/2012	4:06:43 PM	Main Vac valve opened
3/13/2012	4:06:43 PM	Helium MFC set to  0.000000
3/13/2012	4:06:43 PM	H2 MFC set to  0.000000
3/13/2012	4:06:43 PM	BCl3 MFC set to  0.000000
3/13/2012	4:06:43 PM	PH3 MFC set to  0.000000
3/13/2012	4:06:43 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:06:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:06:43 PM	Tube furnace set to 0
3/13/2012	4:07:13 PM	H2 valve closed
3/13/2012	4:07:13 PM	BCl3 valve closed
3/13/2012	4:07:13 PM	PH3 valve closed
3/13/2012	4:07:13 PM	SiCl4 pre valve closed
3/13/2012	4:07:13 PM	SiCl4 post valve closed
3/13/2012	4:07:13 PM	Bypass valve closed
3/13/2012	4:07:13 PM	Bubbler valve closed
3/13/2012	4:07:13 PM	Helium valve opened
3/13/2012	4:07:13 PM	Main Vac valve opened
3/13/2012	4:07:13 PM	Helium MFC set to  20.000000
3/13/2012	4:07:13 PM	H2 MFC set to  0.000000
3/13/2012	4:07:13 PM	BCl3 MFC set to  0.000000
3/13/2012	4:07:13 PM	PH3 MFC set to  0.000000
3/13/2012	4:07:13 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:07:13 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:07:13 PM	Tube furnace set to 0
3/13/2012	4:07:43 PM	Helium valve closed
3/13/2012	4:07:43 PM	H2 valve closed
3/13/2012	4:07:43 PM	BCl3 valve closed
3/13/2012	4:07:43 PM	PH3 valve closed
3/13/2012	4:07:43 PM	SiCl4 pre valve closed
3/13/2012	4:07:43 PM	SiCl4 post valve closed
3/13/2012	4:07:43 PM	Bypass valve closed
3/13/2012	4:07:43 PM	Bubbler valve closed
3/13/2012	4:07:43 PM	Main Vac valve opened
3/13/2012	4:07:43 PM	Helium MFC set to  0.000000
3/13/2012	4:07:43 PM	H2 MFC set to  0.000000
3/13/2012	4:07:43 PM	BCl3 MFC set to  0.000000
3/13/2012	4:07:43 PM	PH3 MFC set to  0.000000
3/13/2012	4:07:43 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:07:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:07:44 PM	Tube furnace set to 0
3/13/2012	4:08:14 PM	H2 valve closed
3/13/2012	4:08:14 PM	BCl3 valve closed
3/13/2012	4:08:14 PM	PH3 valve closed
3/13/2012	4:08:14 PM	SiCl4 pre valve closed
3/13/2012	4:08:14 PM	SiCl4 post valve closed
3/13/2012	4:08:14 PM	Bypass valve closed
3/13/2012	4:08:14 PM	Bubbler valve closed
3/13/2012	4:08:14 PM	Helium valve opened
3/13/2012	4:08:14 PM	Main Vac valve opened
3/13/2012	4:08:14 PM	Helium MFC set to  20.000000
3/13/2012	4:08:14 PM	H2 MFC set to  0.000000
3/13/2012	4:08:14 PM	BCl3 MFC set to  0.000000
3/13/2012	4:08:14 PM	PH3 MFC set to  0.000000
3/13/2012	4:08:14 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:08:14 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:08:14 PM	Tube furnace set to 0
3/13/2012	4:08:44 PM	Helium valve closed
3/13/2012	4:08:44 PM	H2 valve closed
3/13/2012	4:08:44 PM	BCl3 valve closed
3/13/2012	4:08:44 PM	PH3 valve closed
3/13/2012	4:08:44 PM	SiCl4 pre valve closed
3/13/2012	4:08:44 PM	SiCl4 post valve closed
3/13/2012	4:08:44 PM	Bypass valve closed
3/13/2012	4:08:44 PM	Bubbler valve closed
3/13/2012	4:08:44 PM	Main Vac valve opened
3/13/2012	4:08:44 PM	Helium MFC set to  0.000000
3/13/2012	4:08:44 PM	H2 MFC set to  0.000000
3/13/2012	4:08:44 PM	BCl3 MFC set to  0.000000
3/13/2012	4:08:44 PM	PH3 MFC set to  0.000000
3/13/2012	4:08:44 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:08:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:08:44 PM	Tube furnace set to 0
3/13/2012	4:09:14 PM	H2 valve closed
3/13/2012	4:09:14 PM	BCl3 valve closed
3/13/2012	4:09:14 PM	PH3 valve closed
3/13/2012	4:09:14 PM	SiCl4 pre valve closed
3/13/2012	4:09:14 PM	SiCl4 post valve closed
3/13/2012	4:09:14 PM	Bypass valve closed
3/13/2012	4:09:14 PM	Bubbler valve closed
3/13/2012	4:09:14 PM	Helium valve opened
3/13/2012	4:09:14 PM	Main Vac valve opened
3/13/2012	4:09:14 PM	Helium MFC set to  20.000000
3/13/2012	4:09:14 PM	H2 MFC set to  0.000000
3/13/2012	4:09:14 PM	BCl3 MFC set to  0.000000
3/13/2012	4:09:14 PM	PH3 MFC set to  0.000000
3/13/2012	4:09:14 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:09:14 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:09:14 PM	Tube furnace set to 0
3/13/2012	4:09:44 PM	Helium valve closed
3/13/2012	4:09:44 PM	H2 valve closed
3/13/2012	4:09:44 PM	BCl3 valve closed
3/13/2012	4:09:44 PM	PH3 valve closed
3/13/2012	4:09:44 PM	SiCl4 pre valve closed
3/13/2012	4:09:44 PM	SiCl4 post valve closed
3/13/2012	4:09:44 PM	Bypass valve closed
3/13/2012	4:09:44 PM	Bubbler valve closed
3/13/2012	4:09:44 PM	Main Vac valve opened
3/13/2012	4:09:44 PM	Helium MFC set to  0.000000
3/13/2012	4:09:44 PM	H2 MFC set to  0.000000
3/13/2012	4:09:44 PM	BCl3 MFC set to  0.000000
3/13/2012	4:09:44 PM	PH3 MFC set to  0.000000
3/13/2012	4:09:44 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:09:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:09:44 PM	Tube furnace set to 0
3/13/2012	4:10:14 PM	H2 valve closed
3/13/2012	4:10:14 PM	BCl3 valve closed
3/13/2012	4:10:14 PM	PH3 valve closed
3/13/2012	4:10:14 PM	SiCl4 pre valve closed
3/13/2012	4:10:14 PM	SiCl4 post valve closed
3/13/2012	4:10:14 PM	Bypass valve closed
3/13/2012	4:10:14 PM	Bubbler valve closed
3/13/2012	4:10:14 PM	Helium valve opened
3/13/2012	4:10:14 PM	Main Vac valve opened
3/13/2012	4:10:14 PM	Helium MFC set to  20.000000
3/13/2012	4:10:14 PM	H2 MFC set to  0.000000
3/13/2012	4:10:14 PM	BCl3 MFC set to  0.000000
3/13/2012	4:10:14 PM	PH3 MFC set to  0.000000
3/13/2012	4:10:14 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:10:14 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:10:15 PM	Tube furnace set to 0
3/13/2012	4:10:45 PM	Helium valve closed
3/13/2012	4:10:45 PM	H2 valve closed
3/13/2012	4:10:45 PM	BCl3 valve closed
3/13/2012	4:10:45 PM	PH3 valve closed
3/13/2012	4:10:45 PM	SiCl4 pre valve closed
3/13/2012	4:10:45 PM	SiCl4 post valve closed
3/13/2012	4:10:45 PM	Bypass valve closed
3/13/2012	4:10:45 PM	Bubbler valve closed
3/13/2012	4:10:45 PM	Main Vac valve opened
3/13/2012	4:10:45 PM	Helium MFC set to  0.000000
3/13/2012	4:10:45 PM	H2 MFC set to  0.000000
3/13/2012	4:10:45 PM	BCl3 MFC set to  0.000000
3/13/2012	4:10:45 PM	PH3 MFC set to  0.000000
3/13/2012	4:10:45 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:10:45 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:10:45 PM	Tube furnace set to 0
3/13/2012	4:11:15 PM	H2 valve closed
3/13/2012	4:11:15 PM	BCl3 valve closed
3/13/2012	4:11:15 PM	PH3 valve closed
3/13/2012	4:11:15 PM	SiCl4 pre valve closed
3/13/2012	4:11:15 PM	SiCl4 post valve closed
3/13/2012	4:11:15 PM	Bypass valve closed
3/13/2012	4:11:15 PM	Bubbler valve closed
3/13/2012	4:11:15 PM	Helium valve opened
3/13/2012	4:11:15 PM	Main Vac valve opened
3/13/2012	4:11:15 PM	Helium MFC set to  20.000000
3/13/2012	4:11:15 PM	H2 MFC set to  0.000000
3/13/2012	4:11:15 PM	BCl3 MFC set to  0.000000
3/13/2012	4:11:15 PM	PH3 MFC set to  0.000000
3/13/2012	4:11:15 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:11:15 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:11:15 PM	Tube furnace set to 0
3/13/2012	4:11:45 PM	Helium valve closed
3/13/2012	4:11:45 PM	H2 valve closed
3/13/2012	4:11:45 PM	BCl3 valve closed
3/13/2012	4:11:45 PM	PH3 valve closed
3/13/2012	4:11:45 PM	SiCl4 pre valve closed
3/13/2012	4:11:45 PM	SiCl4 post valve closed
3/13/2012	4:11:45 PM	Bypass valve closed
3/13/2012	4:11:45 PM	Bubbler valve closed
3/13/2012	4:11:45 PM	Main Vac valve opened
3/13/2012	4:11:45 PM	Helium MFC set to  0.000000
3/13/2012	4:11:45 PM	H2 MFC set to  0.000000
3/13/2012	4:11:45 PM	BCl3 MFC set to  0.000000
3/13/2012	4:11:45 PM	PH3 MFC set to  0.000000
3/13/2012	4:11:45 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:11:45 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:11:45 PM	Tube furnace set to 0
3/13/2012	4:11:46 PM	Run finished at 4:11 PM
3/13/2012	4:11:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	4:17:02 PM	Main Vac valve closed
3/13/2012	4:17:14 PM	Main Vac valve opened
3/13/2012	4:17:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	4:17:29 PM	Recipe started at 4:17 PM
3/13/2012	4:17:29 PM	Helium valve closed
3/13/2012	4:17:29 PM	H2 valve closed
3/13/2012	4:17:29 PM	BCl3 valve closed
3/13/2012	4:17:29 PM	PH3 valve closed
3/13/2012	4:17:29 PM	SiCl4 pre valve closed
3/13/2012	4:17:29 PM	SiCl4 post valve closed
3/13/2012	4:17:29 PM	Main Vac valve closed
3/13/2012	4:17:29 PM	Bubbler valve closed
3/13/2012	4:17:29 PM	Bypass valve opened
3/13/2012	4:17:29 PM	Helium MFC set to  0.000000
3/13/2012	4:17:29 PM	H2 MFC set to  0.000000
3/13/2012	4:17:29 PM	BCl3 MFC set to  0.000000
3/13/2012	4:17:29 PM	PH3 MFC set to  0.000000
3/13/2012	4:17:29 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:17:29 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:17:29 PM	Tube furnace set to 0
3/13/2012	4:17:29 PM	Helium valve closed
3/13/2012	4:17:29 PM	H2 valve closed
3/13/2012	4:17:29 PM	BCl3 valve closed
3/13/2012	4:17:29 PM	PH3 valve closed
3/13/2012	4:17:29 PM	SiCl4 pre valve closed
3/13/2012	4:17:29 PM	SiCl4 post valve closed
3/13/2012	4:17:29 PM	Main Vac valve closed
3/13/2012	4:17:29 PM	Bubbler valve closed
3/13/2012	4:17:29 PM	Bypass valve opened
3/13/2012	4:17:29 PM	Helium MFC set to  0.000000
3/13/2012	4:17:29 PM	H2 MFC set to  0.000000
3/13/2012	4:17:29 PM	BCl3 MFC set to  0.000000
3/13/2012	4:17:29 PM	PH3 MFC set to  0.000000
3/13/2012	4:17:29 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:17:29 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:17:29 PM	Tube furnace set to 0
3/13/2012	4:17:59 PM	Helium valve closed
3/13/2012	4:17:59 PM	H2 valve closed
3/13/2012	4:17:59 PM	BCl3 valve closed
3/13/2012	4:17:59 PM	PH3 valve closed
3/13/2012	4:17:59 PM	SiCl4 pre valve closed
3/13/2012	4:17:59 PM	SiCl4 post valve closed
3/13/2012	4:17:59 PM	Bypass valve closed
3/13/2012	4:17:59 PM	Bubbler valve closed
3/13/2012	4:17:59 PM	Main Vac valve opened
3/13/2012	4:17:59 PM	Helium MFC set to  0.000000
3/13/2012	4:17:59 PM	H2 MFC set to  0.000000
3/13/2012	4:17:59 PM	BCl3 MFC set to  0.000000
3/13/2012	4:17:59 PM	PH3 MFC set to  0.000000
3/13/2012	4:17:59 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:17:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:18:00 PM	Tube furnace set to 0
3/13/2012	4:18:30 PM	H2 valve closed
3/13/2012	4:18:30 PM	BCl3 valve closed
3/13/2012	4:18:30 PM	PH3 valve closed
3/13/2012	4:18:30 PM	SiCl4 pre valve closed
3/13/2012	4:18:30 PM	SiCl4 post valve closed
3/13/2012	4:18:30 PM	Bypass valve closed
3/13/2012	4:18:30 PM	Bubbler valve closed
3/13/2012	4:18:30 PM	Helium valve opened
3/13/2012	4:18:30 PM	Main Vac valve opened
3/13/2012	4:18:30 PM	Helium MFC set to  20.000000
3/13/2012	4:18:30 PM	H2 MFC set to  0.000000
3/13/2012	4:18:30 PM	BCl3 MFC set to  0.000000
3/13/2012	4:18:30 PM	PH3 MFC set to  0.000000
3/13/2012	4:18:30 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:18:30 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:18:30 PM	Tube furnace set to 0
3/13/2012	4:19:00 PM	Helium valve closed
3/13/2012	4:19:00 PM	H2 valve closed
3/13/2012	4:19:00 PM	BCl3 valve closed
3/13/2012	4:19:00 PM	PH3 valve closed
3/13/2012	4:19:00 PM	SiCl4 pre valve closed
3/13/2012	4:19:00 PM	SiCl4 post valve closed
3/13/2012	4:19:00 PM	Bypass valve closed
3/13/2012	4:19:00 PM	Bubbler valve closed
3/13/2012	4:19:00 PM	Main Vac valve opened
3/13/2012	4:19:00 PM	Helium MFC set to  0.000000
3/13/2012	4:19:00 PM	H2 MFC set to  0.000000
3/13/2012	4:19:00 PM	BCl3 MFC set to  0.000000
3/13/2012	4:19:00 PM	PH3 MFC set to  0.000000
3/13/2012	4:19:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:19:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:19:00 PM	Tube furnace set to 0
3/13/2012	4:19:30 PM	H2 valve closed
3/13/2012	4:19:30 PM	BCl3 valve closed
3/13/2012	4:19:30 PM	PH3 valve closed
3/13/2012	4:19:30 PM	SiCl4 pre valve closed
3/13/2012	4:19:30 PM	SiCl4 post valve closed
3/13/2012	4:19:30 PM	Bypass valve closed
3/13/2012	4:19:30 PM	Bubbler valve closed
3/13/2012	4:19:30 PM	Helium valve opened
3/13/2012	4:19:30 PM	Main Vac valve opened
3/13/2012	4:19:30 PM	Helium MFC set to  20.000000
3/13/2012	4:19:30 PM	H2 MFC set to  0.000000
3/13/2012	4:19:30 PM	BCl3 MFC set to  0.000000
3/13/2012	4:19:30 PM	PH3 MFC set to  0.000000
3/13/2012	4:19:30 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:19:30 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:19:30 PM	Tube furnace set to 0
3/13/2012	4:20:00 PM	Helium valve closed
3/13/2012	4:20:00 PM	H2 valve closed
3/13/2012	4:20:00 PM	BCl3 valve closed
3/13/2012	4:20:00 PM	PH3 valve closed
3/13/2012	4:20:00 PM	SiCl4 pre valve closed
3/13/2012	4:20:00 PM	SiCl4 post valve closed
3/13/2012	4:20:00 PM	Bypass valve closed
3/13/2012	4:20:00 PM	Bubbler valve closed
3/13/2012	4:20:00 PM	Main Vac valve opened
3/13/2012	4:20:00 PM	Helium MFC set to  0.000000
3/13/2012	4:20:00 PM	H2 MFC set to  0.000000
3/13/2012	4:20:00 PM	BCl3 MFC set to  0.000000
3/13/2012	4:20:00 PM	PH3 MFC set to  0.000000
3/13/2012	4:20:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:20:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:20:00 PM	Tube furnace set to 0
3/13/2012	4:20:30 PM	H2 valve closed
3/13/2012	4:20:30 PM	BCl3 valve closed
3/13/2012	4:20:30 PM	PH3 valve closed
3/13/2012	4:20:30 PM	SiCl4 pre valve closed
3/13/2012	4:20:30 PM	SiCl4 post valve closed
3/13/2012	4:20:30 PM	Bypass valve closed
3/13/2012	4:20:30 PM	Bubbler valve closed
3/13/2012	4:20:30 PM	Helium valve opened
3/13/2012	4:20:30 PM	Main Vac valve opened
3/13/2012	4:20:30 PM	Helium MFC set to  20.000000
3/13/2012	4:20:30 PM	H2 MFC set to  0.000000
3/13/2012	4:20:30 PM	BCl3 MFC set to  0.000000
3/13/2012	4:20:30 PM	PH3 MFC set to  0.000000
3/13/2012	4:20:30 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:20:30 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:20:31 PM	Tube furnace set to 0
3/13/2012	4:21:01 PM	Helium valve closed
3/13/2012	4:21:01 PM	H2 valve closed
3/13/2012	4:21:01 PM	BCl3 valve closed
3/13/2012	4:21:01 PM	PH3 valve closed
3/13/2012	4:21:01 PM	SiCl4 pre valve closed
3/13/2012	4:21:01 PM	SiCl4 post valve closed
3/13/2012	4:21:01 PM	Bypass valve closed
3/13/2012	4:21:01 PM	Bubbler valve closed
3/13/2012	4:21:01 PM	Main Vac valve opened
3/13/2012	4:21:01 PM	Helium MFC set to  0.000000
3/13/2012	4:21:01 PM	H2 MFC set to  0.000000
3/13/2012	4:21:01 PM	BCl3 MFC set to  0.000000
3/13/2012	4:21:01 PM	PH3 MFC set to  0.000000
3/13/2012	4:21:01 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:21:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:21:01 PM	Tube furnace set to 0
3/13/2012	4:21:31 PM	H2 valve closed
3/13/2012	4:21:31 PM	BCl3 valve closed
3/13/2012	4:21:31 PM	PH3 valve closed
3/13/2012	4:21:31 PM	SiCl4 pre valve closed
3/13/2012	4:21:31 PM	SiCl4 post valve closed
3/13/2012	4:21:31 PM	Bypass valve closed
3/13/2012	4:21:31 PM	Bubbler valve closed
3/13/2012	4:21:31 PM	Helium valve opened
3/13/2012	4:21:31 PM	Main Vac valve opened
3/13/2012	4:21:31 PM	Helium MFC set to  20.000000
3/13/2012	4:21:31 PM	H2 MFC set to  0.000000
3/13/2012	4:21:31 PM	BCl3 MFC set to  0.000000
3/13/2012	4:21:31 PM	PH3 MFC set to  0.000000
3/13/2012	4:21:31 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:21:31 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:21:31 PM	Tube furnace set to 0
3/13/2012	4:22:01 PM	Helium valve closed
3/13/2012	4:22:01 PM	H2 valve closed
3/13/2012	4:22:01 PM	BCl3 valve closed
3/13/2012	4:22:01 PM	PH3 valve closed
3/13/2012	4:22:01 PM	SiCl4 pre valve closed
3/13/2012	4:22:01 PM	SiCl4 post valve closed
3/13/2012	4:22:01 PM	Bypass valve closed
3/13/2012	4:22:01 PM	Bubbler valve closed
3/13/2012	4:22:01 PM	Main Vac valve opened
3/13/2012	4:22:01 PM	Helium MFC set to  0.000000
3/13/2012	4:22:01 PM	H2 MFC set to  0.000000
3/13/2012	4:22:01 PM	BCl3 MFC set to  0.000000
3/13/2012	4:22:01 PM	PH3 MFC set to  0.000000
3/13/2012	4:22:01 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:22:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:22:01 PM	Tube furnace set to 0
3/13/2012	4:22:31 PM	H2 valve closed
3/13/2012	4:22:31 PM	BCl3 valve closed
3/13/2012	4:22:31 PM	PH3 valve closed
3/13/2012	4:22:31 PM	SiCl4 pre valve closed
3/13/2012	4:22:31 PM	SiCl4 post valve closed
3/13/2012	4:22:31 PM	Bypass valve closed
3/13/2012	4:22:31 PM	Bubbler valve closed
3/13/2012	4:22:31 PM	Helium valve opened
3/13/2012	4:22:31 PM	Main Vac valve opened
3/13/2012	4:22:31 PM	Helium MFC set to  20.000000
3/13/2012	4:22:31 PM	H2 MFC set to  0.000000
3/13/2012	4:22:31 PM	BCl3 MFC set to  0.000000
3/13/2012	4:22:31 PM	PH3 MFC set to  0.000000
3/13/2012	4:22:31 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:22:31 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:22:31 PM	Tube furnace set to 0
3/13/2012	4:23:01 PM	Helium valve closed
3/13/2012	4:23:01 PM	H2 valve closed
3/13/2012	4:23:01 PM	BCl3 valve closed
3/13/2012	4:23:01 PM	PH3 valve closed
3/13/2012	4:23:01 PM	SiCl4 pre valve closed
3/13/2012	4:23:01 PM	SiCl4 post valve closed
3/13/2012	4:23:01 PM	Bypass valve closed
3/13/2012	4:23:01 PM	Bubbler valve closed
3/13/2012	4:23:01 PM	Main Vac valve opened
3/13/2012	4:23:01 PM	Helium MFC set to  0.000000
3/13/2012	4:23:01 PM	H2 MFC set to  0.000000
3/13/2012	4:23:01 PM	BCl3 MFC set to  0.000000
3/13/2012	4:23:01 PM	PH3 MFC set to  0.000000
3/13/2012	4:23:01 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:23:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:23:02 PM	Tube furnace set to 0
3/13/2012	4:23:32 PM	H2 valve closed
3/13/2012	4:23:32 PM	BCl3 valve closed
3/13/2012	4:23:32 PM	PH3 valve closed
3/13/2012	4:23:32 PM	SiCl4 pre valve closed
3/13/2012	4:23:32 PM	SiCl4 post valve closed
3/13/2012	4:23:32 PM	Bypass valve closed
3/13/2012	4:23:32 PM	Bubbler valve closed
3/13/2012	4:23:32 PM	Helium valve opened
3/13/2012	4:23:32 PM	Main Vac valve opened
3/13/2012	4:23:32 PM	Helium MFC set to  20.000000
3/13/2012	4:23:32 PM	H2 MFC set to  0.000000
3/13/2012	4:23:32 PM	BCl3 MFC set to  0.000000
3/13/2012	4:23:32 PM	PH3 MFC set to  0.000000
3/13/2012	4:23:32 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:23:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:23:32 PM	Tube furnace set to 0
3/13/2012	4:24:02 PM	Helium valve closed
3/13/2012	4:24:02 PM	H2 valve closed
3/13/2012	4:24:02 PM	BCl3 valve closed
3/13/2012	4:24:02 PM	PH3 valve closed
3/13/2012	4:24:02 PM	SiCl4 pre valve closed
3/13/2012	4:24:02 PM	SiCl4 post valve closed
3/13/2012	4:24:02 PM	Bypass valve closed
3/13/2012	4:24:02 PM	Bubbler valve closed
3/13/2012	4:24:02 PM	Main Vac valve opened
3/13/2012	4:24:02 PM	Helium MFC set to  0.000000
3/13/2012	4:24:02 PM	H2 MFC set to  0.000000
3/13/2012	4:24:02 PM	BCl3 MFC set to  0.000000
3/13/2012	4:24:02 PM	PH3 MFC set to  0.000000
3/13/2012	4:24:02 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:24:02 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:24:02 PM	Tube furnace set to 0
3/13/2012	4:24:32 PM	H2 valve closed
3/13/2012	4:24:32 PM	BCl3 valve closed
3/13/2012	4:24:32 PM	PH3 valve closed
3/13/2012	4:24:32 PM	SiCl4 pre valve closed
3/13/2012	4:24:32 PM	SiCl4 post valve closed
3/13/2012	4:24:32 PM	Bypass valve closed
3/13/2012	4:24:32 PM	Bubbler valve closed
3/13/2012	4:24:32 PM	Helium valve opened
3/13/2012	4:24:32 PM	Main Vac valve opened
3/13/2012	4:24:32 PM	Helium MFC set to  20.000000
3/13/2012	4:24:32 PM	H2 MFC set to  0.000000
3/13/2012	4:24:32 PM	BCl3 MFC set to  0.000000
3/13/2012	4:24:32 PM	PH3 MFC set to  0.000000
3/13/2012	4:24:32 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:24:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:24:32 PM	Tube furnace set to 0
3/13/2012	4:25:02 PM	Helium valve closed
3/13/2012	4:25:02 PM	H2 valve closed
3/13/2012	4:25:02 PM	BCl3 valve closed
3/13/2012	4:25:02 PM	PH3 valve closed
3/13/2012	4:25:02 PM	SiCl4 pre valve closed
3/13/2012	4:25:02 PM	SiCl4 post valve closed
3/13/2012	4:25:02 PM	Bypass valve closed
3/13/2012	4:25:02 PM	Bubbler valve closed
3/13/2012	4:25:02 PM	Main Vac valve opened
3/13/2012	4:25:02 PM	Helium MFC set to  0.000000
3/13/2012	4:25:02 PM	H2 MFC set to  0.000000
3/13/2012	4:25:02 PM	BCl3 MFC set to  0.000000
3/13/2012	4:25:02 PM	PH3 MFC set to  0.000000
3/13/2012	4:25:02 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:25:02 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:25:02 PM	Tube furnace set to 0
3/13/2012	4:25:32 PM	H2 valve closed
3/13/2012	4:25:32 PM	BCl3 valve closed
3/13/2012	4:25:32 PM	PH3 valve closed
3/13/2012	4:25:32 PM	SiCl4 pre valve closed
3/13/2012	4:25:32 PM	SiCl4 post valve closed
3/13/2012	4:25:32 PM	Bypass valve closed
3/13/2012	4:25:32 PM	Bubbler valve closed
3/13/2012	4:25:32 PM	Helium valve opened
3/13/2012	4:25:32 PM	Main Vac valve opened
3/13/2012	4:25:33 PM	Helium MFC set to  20.000000
3/13/2012	4:25:33 PM	H2 MFC set to  0.000000
3/13/2012	4:25:33 PM	BCl3 MFC set to  0.000000
3/13/2012	4:25:33 PM	PH3 MFC set to  0.000000
3/13/2012	4:25:33 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:25:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:25:33 PM	Tube furnace set to 0
3/13/2012	4:26:03 PM	Helium valve closed
3/13/2012	4:26:03 PM	H2 valve closed
3/13/2012	4:26:03 PM	BCl3 valve closed
3/13/2012	4:26:03 PM	PH3 valve closed
3/13/2012	4:26:03 PM	SiCl4 pre valve closed
3/13/2012	4:26:03 PM	SiCl4 post valve closed
3/13/2012	4:26:03 PM	Bypass valve closed
3/13/2012	4:26:03 PM	Bubbler valve closed
3/13/2012	4:26:03 PM	Main Vac valve opened
3/13/2012	4:26:03 PM	Helium MFC set to  0.000000
3/13/2012	4:26:03 PM	H2 MFC set to  0.000000
3/13/2012	4:26:03 PM	BCl3 MFC set to  0.000000
3/13/2012	4:26:03 PM	PH3 MFC set to  0.000000
3/13/2012	4:26:03 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:26:03 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:26:03 PM	Tube furnace set to 0
3/13/2012	4:26:33 PM	H2 valve closed
3/13/2012	4:26:33 PM	BCl3 valve closed
3/13/2012	4:26:33 PM	PH3 valve closed
3/13/2012	4:26:33 PM	SiCl4 pre valve closed
3/13/2012	4:26:33 PM	SiCl4 post valve closed
3/13/2012	4:26:33 PM	Bypass valve closed
3/13/2012	4:26:33 PM	Bubbler valve closed
3/13/2012	4:26:33 PM	Helium valve opened
3/13/2012	4:26:33 PM	Main Vac valve opened
3/13/2012	4:26:33 PM	Helium MFC set to  20.000000
3/13/2012	4:26:33 PM	H2 MFC set to  0.000000
3/13/2012	4:26:33 PM	BCl3 MFC set to  0.000000
3/13/2012	4:26:33 PM	PH3 MFC set to  0.000000
3/13/2012	4:26:33 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:26:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:26:33 PM	Tube furnace set to 0
3/13/2012	4:27:03 PM	Helium valve closed
3/13/2012	4:27:03 PM	H2 valve closed
3/13/2012	4:27:03 PM	BCl3 valve closed
3/13/2012	4:27:03 PM	PH3 valve closed
3/13/2012	4:27:03 PM	SiCl4 pre valve closed
3/13/2012	4:27:03 PM	SiCl4 post valve closed
3/13/2012	4:27:03 PM	Bypass valve closed
3/13/2012	4:27:03 PM	Bubbler valve closed
3/13/2012	4:27:03 PM	Main Vac valve opened
3/13/2012	4:27:03 PM	Helium MFC set to  0.000000
3/13/2012	4:27:03 PM	H2 MFC set to  0.000000
3/13/2012	4:27:03 PM	BCl3 MFC set to  0.000000
3/13/2012	4:27:03 PM	PH3 MFC set to  0.000000
3/13/2012	4:27:03 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:27:03 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:27:03 PM	Tube furnace set to 0
3/13/2012	4:27:30 PM	Run aborted at 4:27 PM
3/13/2012	4:27:30 PM	Helium valve closed
3/13/2012	4:27:30 PM	H2 valve closed
3/13/2012	4:27:30 PM	BCl3 valve closed
3/13/2012	4:27:30 PM	PH3 valve closed
3/13/2012	4:27:30 PM	SiCl4 pre valve closed
3/13/2012	4:27:30 PM	SiCl4 post valve closed
3/13/2012	4:27:30 PM	Bypass valve closed
3/13/2012	4:27:30 PM	Main Vac valve closed
3/13/2012	4:27:30 PM	Bubbler valve closed
3/13/2012	4:27:30 PM	Helium MFC set to  0.000000
3/13/2012	4:27:30 PM	H2 MFC set to  0.000000
3/13/2012	4:27:30 PM	BCl3 MFC set to  0.000000
3/13/2012	4:27:30 PM	PH3 MFC set to  0.000000
3/13/2012	4:27:30 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:27:30 PM	Tube furnace set to 0
3/13/2012	4:27:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
3/13/2012	4:27:33 PM	Main Vac valve opened
3/13/2012	4:27:50 PM	Main Vac valve closed
3/13/2012	4:27:59 PM	Main Vac valve opened
3/13/2012	4:29:12 PM	Recipe started at 4:29 PM
3/13/2012	4:29:12 PM	Helium valve closed
3/13/2012	4:29:12 PM	H2 valve closed
3/13/2012	4:29:12 PM	BCl3 valve closed
3/13/2012	4:29:12 PM	PH3 valve closed
3/13/2012	4:29:12 PM	SiCl4 pre valve closed
3/13/2012	4:29:12 PM	SiCl4 post valve closed
3/13/2012	4:29:12 PM	Main Vac valve closed
3/13/2012	4:29:12 PM	Bypass valve closed
3/13/2012	4:29:12 PM	Bubbler valve closed
3/13/2012	4:29:12 PM	Helium MFC set to  0.000000
3/13/2012	4:29:12 PM	H2 MFC set to  0.000000
3/13/2012	4:29:12 PM	BCl3 MFC set to  0.000000
3/13/2012	4:29:12 PM	PH3 MFC set to  0.000000
3/13/2012	4:29:12 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:29:12 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:29:12 PM	Tube furnace set to 0
3/13/2012	4:29:16 PM	Helium valve closed
3/13/2012	4:29:16 PM	BCl3 valve closed
3/13/2012	4:29:16 PM	PH3 valve closed
3/13/2012	4:29:16 PM	SiCl4 pre valve closed
3/13/2012	4:29:16 PM	SiCl4 post valve closed
3/13/2012	4:29:16 PM	Main Vac valve closed
3/13/2012	4:29:16 PM	Bypass valve closed
3/13/2012	4:29:16 PM	Bubbler valve closed
3/13/2012	4:29:16 PM	H2 valve opened
3/13/2012	4:29:16 PM	Helium MFC set to  0.000000
3/13/2012	4:29:16 PM	H2 MFC set to  500.000000
3/13/2012	4:29:16 PM	BCl3 MFC set to  0.000000
3/13/2012	4:29:16 PM	PH3 MFC set to  0.000000
3/13/2012	4:29:16 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:29:16 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:29:16 PM	Tube furnace set to 0
3/13/2012	4:30:23 PM	Helium valve closed
3/13/2012	4:30:23 PM	BCl3 valve closed
3/13/2012	4:30:23 PM	PH3 valve closed
3/13/2012	4:30:23 PM	SiCl4 pre valve closed
3/13/2012	4:30:23 PM	SiCl4 post valve closed
3/13/2012	4:30:23 PM	Main Vac valve closed
3/13/2012	4:30:23 PM	Bypass valve closed
3/13/2012	4:30:23 PM	H2 valve opened
3/13/2012	4:30:23 PM	Bubbler valve opened
3/13/2012	4:30:23 PM	Helium MFC set to  0.000000
3/13/2012	4:30:23 PM	H2 MFC set to  500.000000
3/13/2012	4:30:23 PM	BCl3 MFC set to  0.000000
3/13/2012	4:30:23 PM	PH3 MFC set to  0.000000
3/13/2012	4:30:23 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:30:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:30:24 PM	Tube furnace set to 0
3/13/2012	4:30:25 PM	Helium valve closed
3/13/2012	4:30:25 PM	BCl3 valve closed
3/13/2012	4:30:25 PM	PH3 valve closed
3/13/2012	4:30:25 PM	SiCl4 pre valve closed
3/13/2012	4:30:25 PM	SiCl4 post valve closed
3/13/2012	4:30:25 PM	Main Vac valve closed
3/13/2012	4:30:25 PM	Bypass valve closed
3/13/2012	4:30:25 PM	H2 valve opened
3/13/2012	4:30:25 PM	Bubbler valve opened
3/13/2012	4:30:25 PM	Helium MFC set to  0.000000
3/13/2012	4:30:25 PM	H2 MFC set to  500.000000
3/13/2012	4:30:25 PM	BCl3 MFC set to  0.000000
3/13/2012	4:30:25 PM	PH3 MFC set to  0.000000
3/13/2012	4:30:25 PM	SiCl4 MFC set to  0.000000
3/13/2012	4:30:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:30:25 PM	Tube furnace set to 950
3/13/2012	4:50:25 PM	Helium valve closed
3/13/2012	4:50:25 PM	BCl3 valve closed
3/13/2012	4:50:25 PM	PH3 valve closed
3/13/2012	4:50:25 PM	Main Vac valve closed
3/13/2012	4:50:25 PM	Bypass valve closed
3/13/2012	4:50:25 PM	H2 valve opened
3/13/2012	4:50:25 PM	SiCl4 pre valve opened
3/13/2012	4:50:25 PM	SiCl4 post valve opened
3/13/2012	4:50:25 PM	Bubbler valve opened
3/13/2012	4:50:25 PM	Helium MFC set to  0.000000
3/13/2012	4:50:25 PM	H2 MFC set to  500.000000
3/13/2012	4:50:25 PM	BCl3 MFC set to  0.000000
3/13/2012	4:50:25 PM	PH3 MFC set to  0.000000
3/13/2012	4:50:25 PM	SiCl4 MFC set to  20.000000
3/13/2012	4:50:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	4:50:25 PM	Tube furnace set to 950
3/13/2012	5:10:25 PM	Helium valve closed
3/13/2012	5:10:25 PM	BCl3 valve closed
3/13/2012	5:10:25 PM	PH3 valve closed
3/13/2012	5:10:25 PM	SiCl4 pre valve closed
3/13/2012	5:10:25 PM	SiCl4 post valve closed
3/13/2012	5:10:25 PM	Main Vac valve closed
3/13/2012	5:10:25 PM	Bypass valve closed
3/13/2012	5:10:25 PM	H2 valve opened
3/13/2012	5:10:25 PM	Bubbler valve opened
3/13/2012	5:10:25 PM	Helium MFC set to  0.000000
3/13/2012	5:10:25 PM	H2 MFC set to  500.000000
3/13/2012	5:10:25 PM	BCl3 MFC set to  0.000000
3/13/2012	5:10:25 PM	PH3 MFC set to  0.000000
3/13/2012	5:10:25 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:10:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:10:25 PM	Tube furnace set to 750
3/13/2012	5:15:25 PM	H2 valve closed
3/13/2012	5:15:25 PM	BCl3 valve closed
3/13/2012	5:15:25 PM	PH3 valve closed
3/13/2012	5:15:25 PM	SiCl4 pre valve closed
3/13/2012	5:15:25 PM	SiCl4 post valve closed
3/13/2012	5:15:25 PM	Main Vac valve closed
3/13/2012	5:15:25 PM	Bypass valve closed
3/13/2012	5:15:25 PM	Helium valve opened
3/13/2012	5:15:25 PM	Bubbler valve opened
3/13/2012	5:15:25 PM	Helium MFC set to  500.000000
3/13/2012	5:15:25 PM	H2 MFC set to  0.000000
3/13/2012	5:15:25 PM	BCl3 MFC set to  0.000000
3/13/2012	5:15:25 PM	PH3 MFC set to  0.000000
3/13/2012	5:15:25 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:15:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:15:25 PM	Tube furnace set to 0
3/13/2012	5:27:27 PM	Helium valve closed
3/13/2012	5:27:27 PM	H2 valve closed
3/13/2012	5:27:27 PM	BCl3 valve closed
3/13/2012	5:27:27 PM	PH3 valve closed
3/13/2012	5:27:27 PM	SiCl4 pre valve closed
3/13/2012	5:27:27 PM	SiCl4 post valve closed
3/13/2012	5:27:27 PM	Main Vac valve closed
3/13/2012	5:27:27 PM	Bypass valve closed
3/13/2012	5:27:27 PM	Bubbler valve closed
3/13/2012	5:27:27 PM	Helium MFC set to  0.000000
3/13/2012	5:27:27 PM	H2 MFC set to  0.000000
3/13/2012	5:27:27 PM	BCl3 MFC set to  0.000000
3/13/2012	5:27:27 PM	PH3 MFC set to  0.000000
3/13/2012	5:27:27 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:27:27 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:27:28 PM	Tube furnace set to 0
3/13/2012	5:27:29 PM	Run finished at 5:27 PM
3/13/2012	5:27:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	5:27:33 PM	Recipe started at 5:27 PM
3/13/2012	5:27:33 PM	Helium valve closed
3/13/2012	5:27:33 PM	H2 valve closed
3/13/2012	5:27:33 PM	BCl3 valve closed
3/13/2012	5:27:33 PM	PH3 valve closed
3/13/2012	5:27:33 PM	SiCl4 pre valve closed
3/13/2012	5:27:33 PM	SiCl4 post valve closed
3/13/2012	5:27:33 PM	Main Vac valve closed
3/13/2012	5:27:33 PM	Bypass valve closed
3/13/2012	5:27:33 PM	Bubbler valve closed
3/13/2012	5:27:33 PM	Helium MFC set to  0.000000
3/13/2012	5:27:33 PM	H2 MFC set to  0.000000
3/13/2012	5:27:33 PM	BCl3 MFC set to  0.000000
3/13/2012	5:27:33 PM	PH3 MFC set to  0.000000
3/13/2012	5:27:33 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:27:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:27:33 PM	Tube furnace set to 0
3/13/2012	5:27:36 PM	H2 valve closed
3/13/2012	5:27:36 PM	BCl3 valve closed
3/13/2012	5:27:36 PM	PH3 valve closed
3/13/2012	5:27:36 PM	SiCl4 pre valve closed
3/13/2012	5:27:36 PM	SiCl4 post valve closed
3/13/2012	5:27:36 PM	Main Vac valve closed
3/13/2012	5:27:36 PM	Bypass valve closed
3/13/2012	5:27:36 PM	Bubbler valve closed
3/13/2012	5:27:36 PM	Helium valve opened
3/13/2012	5:27:36 PM	Helium MFC set to  500.000000
3/13/2012	5:27:36 PM	H2 MFC set to  0.000000
3/13/2012	5:27:36 PM	BCl3 MFC set to  0.000000
3/13/2012	5:27:36 PM	PH3 MFC set to  0.000000
3/13/2012	5:27:36 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:27:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:27:36 PM	Tube furnace set to 0
3/13/2012	5:27:36 PM	Helium valve closed
3/13/2012	5:27:36 PM	H2 valve closed
3/13/2012	5:27:36 PM	BCl3 valve closed
3/13/2012	5:27:36 PM	PH3 valve closed
3/13/2012	5:27:37 PM	SiCl4 pre valve closed
3/13/2012	5:27:37 PM	SiCl4 post valve closed
3/13/2012	5:27:37 PM	Main Vac valve closed
3/13/2012	5:27:37 PM	Bypass valve closed
3/13/2012	5:27:37 PM	Bubbler valve closed
3/13/2012	5:27:37 PM	Helium MFC set to  0.000000
3/13/2012	5:27:37 PM	H2 MFC set to  0.000000
3/13/2012	5:27:37 PM	BCl3 MFC set to  0.000000
3/13/2012	5:27:37 PM	PH3 MFC set to  0.000000
3/13/2012	5:27:37 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:27:37 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:27:37 PM	Tube furnace set to 0
3/13/2012	5:27:38 PM	Run finished at 5:27 PM
3/13/2012	5:27:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2012	5:31:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2012	5:32:00 PM	Recipe started at 5:32 PM
3/13/2012	5:32:00 PM	Helium valve closed
3/13/2012	5:32:00 PM	H2 valve closed
3/13/2012	5:32:00 PM	BCl3 valve closed
3/13/2012	5:32:00 PM	PH3 valve closed
3/13/2012	5:32:00 PM	SiCl4 pre valve closed
3/13/2012	5:32:00 PM	SiCl4 post valve closed
3/13/2012	5:32:00 PM	Main Vac valve closed
3/13/2012	5:32:00 PM	Bubbler valve closed
3/13/2012	5:32:00 PM	Bypass valve opened
3/13/2012	5:32:00 PM	Helium MFC set to  0.000000
3/13/2012	5:32:00 PM	H2 MFC set to  0.000000
3/13/2012	5:32:00 PM	BCl3 MFC set to  0.000000
3/13/2012	5:32:00 PM	PH3 MFC set to  0.000000
3/13/2012	5:32:00 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:32:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:32:00 PM	Tube furnace set to 0
3/13/2012	5:33:01 PM	Helium valve closed
3/13/2012	5:33:01 PM	H2 valve closed
3/13/2012	5:33:01 PM	BCl3 valve closed
3/13/2012	5:33:01 PM	PH3 valve closed
3/13/2012	5:33:01 PM	SiCl4 pre valve closed
3/13/2012	5:33:01 PM	SiCl4 post valve closed
3/13/2012	5:33:01 PM	Main Vac valve closed
3/13/2012	5:33:01 PM	Bubbler valve closed
3/13/2012	5:33:01 PM	Bypass valve opened
3/13/2012	5:33:01 PM	Helium MFC set to  0.000000
3/13/2012	5:33:01 PM	H2 MFC set to  0.000000
3/13/2012	5:33:01 PM	BCl3 MFC set to  0.000000
3/13/2012	5:33:01 PM	PH3 MFC set to  0.000000
3/13/2012	5:33:01 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:33:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:33:01 PM	Tube furnace set to 0
3/13/2012	5:34:01 PM	Helium valve closed
3/13/2012	5:34:01 PM	H2 valve closed
3/13/2012	5:34:01 PM	BCl3 valve closed
3/13/2012	5:34:01 PM	PH3 valve closed
3/13/2012	5:34:01 PM	SiCl4 pre valve closed
3/13/2012	5:34:01 PM	SiCl4 post valve closed
3/13/2012	5:34:01 PM	Bypass valve closed
3/13/2012	5:34:01 PM	Bubbler valve closed
3/13/2012	5:34:01 PM	Main Vac valve opened
3/13/2012	5:34:01 PM	Helium MFC set to  0.000000
3/13/2012	5:34:01 PM	H2 MFC set to  0.000000
3/13/2012	5:34:01 PM	BCl3 MFC set to  0.000000
3/13/2012	5:34:01 PM	PH3 MFC set to  0.000000
3/13/2012	5:34:01 PM	SiCl4 MFC set to  0.000000
3/13/2012	5:34:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2012	5:34:02 PM	Tube furnace set to 0
3/13/2012	5:34:03 PM	Run finished at 5:34 PM
3/13/2012	5:34:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
